3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT (mm) A One-touch fitting d Part No.

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 167 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.50 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.45 0.006 0.40 0.005 0.35 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.30 0.004 0.25 0.003 0.20

Digital Flow Switch (Manifold type)

Width across flats of attachment With across flats of the main port 3/8 20.9 mm 1 41 mm 1/2 23.9 mm 3/4 29.9 mm After hand tightening, tighten the hexagon head bolt 2 to 3 rotations by using a spanner. Refer to the table below for the tightening torque.

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

Vacuum Unit Ejector / Vacuum Pump System

Replacement Parts 41 7.5. Replacement Parts for Manifold/How to Order 41 8. Maintenance 48 8.1. Maintenance 48 8.2. Replacement Procedure 50 9. Specifications 55 10. Port Layout 60 11. Exhaust/Flow Rate Characteristics 70 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 70 11.2. Vacuum Pump System Flow Rate Characteristics 72 11.3.

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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

) (67) (73) Pilot port threaded type 20 39 30 A A 32 2 x 5 MAX 14 (52.6) M5 x 0.8 Depth 5 Pilot port M5 x 0.8 Depth 5 Pilot port 44 36.5 23.5 1/8 1/8 9.5 (41) 4.5 (67) 501 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M5 thread. Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Ionizer IZS40/41/42 Series

RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter cartridge type/Emitter material Symbol Nil C J K Feedback sensor cannot be used

Ionizer Series IZS40/41/42

RoHS Ionizer Series IZS40/41/42 How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Electrode cartridge type/Electrode needle material Feedback sensor cannot be used for the

155

Mass (g) Auto Switch Internal Circuit D-M9N D-M9P D-M9B Auto switch model 0.5 8 8 7 D-M9N 1 14 14 13 Lead wire length (m) DC (+) Brown 3 41 41 38 5 68 68 63 Main circuit of switch OUT Black Dimensions (mm) DC () Blue D-M9l M2.5 x 4 l Slotted set screw D-M9P DC (+) Brown Indicator light 2.6 Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC () Blue VNA D-M9B VNB 3.2 OUT

Air Cylinder Series MB

41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

HAW

AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

5 Port Solenoid Valve

194.8 (200.3) 91.7 121.8 213.5 2 105.8 4(A) port 17.5 105.8 59.5 13.5 2(B) port 13.5 (B port) (A port) 17.5 SMC 2 4 2 4 SMC A B A B 66 53 40 53 66 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 2 x 6.5 Mounting hole 53 35 Manual override Manual override 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 31.5 37 41 50 162 G1/2 R1 R2 P 18.4 Electrical entry 1/8" PE. port 41 41 27.5

Cylinder with lock

Troubleshooting P. 41 6. Maintenance P. 43 6-1. Construction -2- 1. Product Specifications 1-1.

Series VCL

11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models

Series VCS

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under