Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

VS7-6

VS7-6-FG-S AXT500-12-2 VFS3000-17-2 AXT500-13 AXT500-13 AXT500-13 AXT503-35 AXT503-35 AXT503-35 AXT503-12-1 AXT503-12-1 AXT503-12-1 MY-11N MY-11N MY-11N Description No.

CV/MVGQ

80 81 f 11.2 11.2 11.2 12.5 14.0 40 50 63 80 100 27 30 31 37 40 13 13 16 16 17 84 90 98 116 126 8 0 0 0 0 27 27 34 44 43 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 The minimum stroke of the one with rod boot is 20 mm or more.

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

CLS

3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5/F59F D-F5W

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 14.5 19 28.5 35.5 44.5 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper

IZx-OMP0064

Power supply connector POWER Connector (e-con) IZS41, IZS42 7 8 12 13 9 1 2 3 4 5 10 11 14 6 Operation NO.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

44.5 28 37 54 71 80 22 34 43.5 58 73 9 12.5 16.5 20 24.5 6 7 10 12 15 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

Air Slide Table Series MXJ

Rod bumper 11 Polyurethane Axial Piping Type Plate 12 Stainless steel DPlug 13 Note Description No.

AC Servo Motor Driver (Pulse input type/Positioning type)

Programmable logic controller 2m max. ( Note 8) FX3UMT/ES (Note 13) Diver S/S Servo amplifier 24V 0V (Note 7) (Note 7) (Note 2) L CN1 CN1 24VDC PLC power (Note 4, 1 0 ) 1 DICOM 9 ALM supply RA1 Trouble (Note 6) N OPC 2 (Note 10, 12) 12 MBR Electromagnetic brake interlock RA2 13 DOCOM Y000 PP 23 23 Note1) COM1 (Note 14) 25 Note1) Y010 NP 25 10m max.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 127 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1S10 Dimensions/LJ1S101SC (X40) Scale: 20% Dimensions other than those shown in the drawing are the same as standard. 100 80 2-5H10 depth 6 4-M5 x 0.8 For work piece mounting 20 Mounting plate 4-9.5 4-5.2 5.5 13 21 (4-M5 x 0.8) Work piece mounting dimensions 83 50 20 15.5 10 95 103 80 42 This

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)

Low Profile Air Gripper Series MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 4 x M6 x 1 thread depth 15 (Mounting thread) 6 159 6 62 174 2 x M6 x 1 thread depth 6 (Mounting thread) 33 144 E 13 25 25 30 41 MHZ E 4 x 5.2 through (Mounting hole) 0 0.1 32 MHF 46 1.2 46 1.2 M5 x 0.8 M5 x 0.8 4 x 10 Finger opening port Finger closing port Close: 0 +0.1 0 MHL E-E Open: 801 MHR 8 x M4 x 0.7 thread depth 4 MHK 128 (Attachment

IP8101 Series

Hold down again for 1sec. or longer after interval No.DIG-31900-OM002 53 Mode button 1s Set button 1s or Mode button 1s Set button 1s or Mode button 1s Mode button 1s Set button Set button 1s 1s Fig. 42 Mode button 1s Set button 1s or Lower limiter Upper limiter Fig. 42-1 Mode button 1s Set button 1s Alarm setting Fig. 42-2 No.DIG-31900-OM002 54 Possible to select analog output

MLGP

Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.

MLGP

Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.