Support Guide/11-LEFG Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

MXH

1 Steel ball B Gasket NBR 8-2-14 13 Compact Slide Series MXH Dimensions: MXH6 LT 15 9 MX J-M3 x 0.5 Depth 6.5 LA LB 8 MTS MY Guide rail width 5 3-M4 x 0.7 through Bottom hole dia 3.3 6-6 counterbore depth 3.3 4-M3 x 0.5 Depth 5.5 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l CY 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Air Cylinder Series CM2

13 8 26 30 28 5 8 20 25 40 45 19.5 8 22 75 60 4 7 10.5 13 17 10 32 37 33.5 6 8 26 32 40 45 19.5 8 22 75 60 4 7 10.5 13 17 12 32 37 37.5 6 8 26 40 52 50 21 11 24 82 66 36 5 7 13.5 16 22 14 41 47.3 46.5 8 10 32 With Air Cushion Built-in One-touch Fittings (mm) (mm) (mm) Bore size Bore size NN NA KA N Z ZZ P S MM K Bore size N1 Q P WA G 8 1 20 20 20 24 6 15 107 116 62 5 21.5 13 6 17.5 8 M8

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

Parallel Type Air Gripper Series MHZ

Note: 1g = 0.0353oz Options Body options/End boss type Single acting type, normally closed Symbol Piping port position Applicable model Double acting Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Single acting Standard Side ported Nil E K H M Axial port 2 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Construction/Standard

JXCx-OMT0023

13.

AC Servo Motor Driver

1 13.

MXW

Recommended Tightening Torque Recommended tightening torque (Nm) Shock absorber fixing thread size Hexagon wrench width across flats (mm) Model 1.5 M3 x 4 0.6 MXW8 1.5 M3 x 4 MXW12 0.6 1.5 M3 x 4 MXW16 0.6 2 M4 x 5 MXW20 0.8 MXW25 2.5 M5 x 6 1 8-7-9 10 Series MXW Dimensions: MXW8 Stroke: 25, 50 mm Operating port 2-M5 x 0.8 J 10 Width across hexagon socket hole 2.5 5.5 Width across flats 8

Clean Room Rodless Cylinder Series CYP ø15, ø32

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

NCG/CG1

13 13 13 13 16 20 20 0.25 stroke (13) (22.5) 10(12) 26.7 119 (13) (25) 10(12) 30.2 121 (13) (25) 10(12) 34.6 139 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

x 0.5 35 + Stroke 7 35 + Stroke 7 Standard type MQQT 40 + Stroke 8.5 13 to 17 M6 x 1 M5 x 0.8 45 + Stroke 9 50 + Stroke 7.5 16 to 22 M8 x 1.25 M6 x 1 50 + Stroke 6 M4 x 0.7 8 to 11 M3 x 0.5 65 + Stroke 7 5.5 70 + Stroke Lateral load resisting type MQQL (Built-in ball bushing) 8 80 + Stroke M5 x 0.8 M6 x 1 13 to 17 6.5 85 + Stroke 7 105 + Stroke M6 x 1 M8 x 1.25 16 to 22 7 105 + Stroke :

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

S070

Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug

CQM

Data 7-5-13

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

10 + 1/2ST 2-3.4 through 2-6.5 counter bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth

Rotary Table Series MSU

x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

Air Slide Table Series MXW

Recommended Tightening Torque Model Shock absorber fixing thread size Recommended tightening torque (Nm) Hexagon wrench width across flats (mm) MXW8 M3 x 4 0.6 1.5 MXW12 M3 x 4 0.6 1.5 MXW16 M3 x 4 0.6 1.5 MXW20 M4 x 5 0.8 2 MXW25 M5 x 6 1 2.5 154 Series MXW Air Slide Table Construction MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS Component Parts No.

SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.