Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB

HRX-OM-Y098

(Recommended tightening torque64 to 70Nm) CH2 particle filter Gasket(1/2) Fig. 3-19 CH2 side Installation of particle filter 6. Attach the CH2 filter bracket.

CNG

(27) 17 (25) 32 6.5 9.5 3.5 8.5 7 30.5 33 33.5 5 23.5 (33) 17.5 (27) 20.5 (30) 22.5 (32) 21 (30.5) 19 (28.5) 40 11 14.5 8.5 13.5 12 35 37.5 38 10 Dimensions inside ( ) are for long strokes. 15 Series CNG Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9

Cylinder with Lock Series CNG

(27) 17 (25) 32 6.5 9.5 3.5 8.5 7 30.5 33 33.5 5 23.5 (33) 17.5 (27) 20.5 (30) 22.5 (32) 21 (30.5) 19 (28.5) 40 11 14.5 8.5 13.5 12 35 37.5 38 10 Dimensions inside ( ) are for long strokes. 15 Cylinder with Lock Series CNG Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Rear piping Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket C ZS-46-E Bottom piping Self tapping screws: Nominal size 3 x 10L (2 pcs) ZS-46-B Rear piping Panel mount adapter ZS-35-B Bottom piping ZS-46-D Rear piping Panel mount adapter + Front protective cover ZS-35-E Bottom piping Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof ZS-27-01 Rear

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE R1 5 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE 5 R1 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

Clamp Cylinder Series CK1

36 48 51.5 33 55 58.5 1326 Clamp Cylinder Series CK1 End Bracket Single knuckle joint Double knuckle joint 12 +0.027 H8 0 Press-fit spring pin Shaft: 12 0.050 d90.093 Hole: 12 +0.027 H8 0 Press-fit spring pin 19 19 3 x 38 L 3 x 38 L 30 30 MK 17 17 20 CKQ CLKQ 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 15 15 CK1 2 x M6 thread depth 11 (for YA type) 33 2 x M6

AW

53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 38.5 42.5 E 30 38 F 83(max.86) 88(max.92) T 8 10.5 Y 31 35.5 Z 7 7 AA 19 21 H 3.5 1.5 S 6.5 8.5 AW30 AW40 6 Series AW20~40 Filter Regulator Standard (Manual Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and Mounting

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Replacement Parts q Material Refer to page 19. XT534-5-001-AS Refer to page 19. Refer to How to Order on page 19. Description No. Solenoid valve Filter element Vacuum pressure switch Fitting PVF 4 5 6 7 i u 18 Series ZQ How to Order Pilot valve How to order connector assembly Connector assembly part no.

Sine Rodless Cylinder Series REBR Direct Mount Type

33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 10 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the A

VK3000

3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3

PSxx-OMU0005CN

-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0005CN-C digit() 1digit=1kPa 1,2,3,,99,100 1kPa F.S.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05