Air Slide Table

29 6 A B NN x M6 x 1 Tapped through hole 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41 51 61 71 96 121 146 171 J 46 46 46 56 72 100 155 190 215 I 16 16 16 16 18 23 25 18 21 NN 2 2 2 2 3 3 4 4 4 H 46 46 46 56 56 56 59 62 G 22 22 22 22 17 18 37 56

F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

CV/MVGQ

Nut Mounting hole 16 [17] S + Stroke Z + Stroke H1 B1 Bore size (mm) 10 16 Mounting hole 7 3.2 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15

CV/MVGQ

90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

LX

Motor side 16 pulse End side 1 A Parameter no.

5-Port Solenoid Valve

If the layout is specified, indicate it on the manifold specification sheet. i Mounting and Option Symbol Mounting Option Name plate Station number Nil Direct mounting 32 M12 NB NBN 16 NC NCN 32 *4 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *3 GAN Ethernet POWERLINK 32 M12 *3 GBN 16

SYJ300/500/700

N.O. 10-SYJ522M Base mounted (With sub-plate) 10-SYJ514M 65(51) 1/8 61(47) 60(46) 82(68) 10-SYJ524M Note) Value for DC.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NX NZ Material: Rolled steel C85 Applicable bore size (mm) 125 140 160 180 200 250 300 Y-12 +0.084 0 +0.3 +0.1 0.1 0.3 32 25 64 Part no. 8 46 100 M30 x 1.5 27 42 D C B d H Y-14 125, 140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 0.1 0.3 +0.084 0 +0.3 +0.1 36 28 72 8 48 105 M30 x 1.5 30 47 53.1 44 46 18 M30 x 1.5 C95 Y-16 +0.1 0 +0.3 +0.1 0.1 0.3 40 32 80 8 55 110 M36 x 1.5 34

Air Cylinder Series CS1

Material: Rolled steel +0.084 0 +0.3 +0.1 0.1 0.3 125 140 160 180 200 250 300 Y-12 32 8 46 27 42 25 64 100 M30 x 1.5 H B C D d Part no. 0.1 0.3 +0.084 0 +0.3 +0.1 Y-14 36 8 48 30 47 28 72 105 M30 x 1.5 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125, 140 160 180 200 250 300 18 46 53.1 44 M30 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-16 8 55 34 46 40 110 32 80 M36 x 1.5 21 55 63.5 53 M36 x 1.5 0.1 0.3 +0.1

MY1

55 6 10 16 28 38.5 46 220 Rc 1/16 Rc 1/8 80 35 264 17 51 16 23 4 16 16 16 MY1B32 70 10 10 19 32 48 55 280 Rc 1/16 Rc 1/4 100 40 322 18.5 59 24 27 10.5 20 22 19.5 MY1B40 23 36 340 14 67 Rc 1/8 60.5 85 12 P indicates cylinder supply ports. 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y S d D R Applicable O-ring Model 28 9 7 6 11.4

Electric Actuator

(Refer to page 16.)

JXCx-OMT0023

(Note 14) Y010 NP 25 (Note 16) 10m max.

Modular F.R.L. Units

*16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

MU

18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058

MU

16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +

VM

26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2 16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 26.2 18.7 9.7 VHS 22 10 8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y N LQ2H2A-F LQ2H2B-F LQ2H2C-F LQ2H2D-F LQ2H2E-F LQ2H2F-F LQ2H3A-F LQ2H3B-F LQ2H3C-F LQ2H3D-F LQ2H4A-F LQ2H4B-F LQ2H4C-F LQ2H4D-F LQ2H5A-F LQ2H5B-F LQ2H5C-F LQ2H5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 39.2 19.9 19 16 18 1/4" 21.5 44.2 43.7 46 45.5 52 51 57 56 63.5 64.5 65 66 1/4" 21.5 26.2 22 24 24 3/8" 25 3/8" 25 21 33.1

Air Cylinder

Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-040B 40 69 22 24 55 M14 x 1.5 12 +0.070 0 16 0.1 0.3 15.5 20 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 40 24 50

MNB

B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150 FY 38 46 52 62 63 75 FZ 87 101 120 135 153 178 B 56 65 77 92 100 120 B 54 63 75 90 102 116 Bore size (mm) Stroke range (mm) 32 40 50 63 80 100 10 14 18 18 22 26 19.5 27