17

200 st 300 st or less Over 100 st 200 st or less Over 30 st 100 st or less 12 16 20 25 14 16 18 26 M5 x 0.8 M5 x 0.8 M6 x 1.0 M6 x 1.0 18 19 25 30 8 10 10.5 13.5 13 14.5 13.5 12.5 48 54 70 78 22 25 30 38 56 62 81 91 41 46 54 64 50 56 72 82 37 38 44 50 20 24 24 24 40 44 44 44 110 110 120 120 200 200 200 200 300 300 15 17 29 29 25 27 39 39 60 60 77 77 105 105 117 117 167 167 23 24 28 34

MHY2/MHW2

4-M4 X 0.7 Depth 5 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) MHQ Auto switch mounting groove position MHL2 MHR O 41 30 18 12 S MHK 4 4 5 MHS M5 X 0.8 (Finger opening port) 20 9 6.45 MHC2 6 MHT2 MHW2-20D1 MHY2 Right angle finger MHW2 MRHQ Auto switch 31 15 10 11 14 5 28 16 4-M4 X 0.7 (Thread for mounting attachment) 41 MHW2-20D.SMHW2, #1 MHW2-20D1.SMHW2, #6 2.8-19 Series

Rotary Gripper Series MRHQ

10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

Escapements Series MIW/MIS

8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4 4 2 18.5 49 6.5 20.5 51 8.5 MIS12-30D MIS20-30D 6 4 4 2 13 Series MIW/MIS Auto Switch Common Specifications Auto Switch

Electric Actuator with Integrated Guide

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Guide Cylinder Series MGG

35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 17 depth 12 M14 x 2 depth 25 For lock type For non-lock type Bore size (mm) Rod end lock Head end lock Bore

10

45 20 19 72 13 M10 x 1.5 10 22 16 5 M22 x 1.5 38 3/8 114 34 102 102 11.5 14 258 100 40 37 114 41 89 30 55 20 19 72 16 M10 x 1.5 10 26 16 5 M26 x 1.5 38 1/2 114 40 124 124 17 15 258 125 54 50 136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2.0 38 1/2 120 50 148 148 17 15 314 With Rod Boot [mm] Bore size [mm] d e f l h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

Pin Cylinders Series CJP2/CJP

M3 AS1001F-23 3.2 AS1211F-M5-23 AS1311F-M5-23 M5 AS1211F-M3-04 AS1311F-M3-04 M3 AS1001F-04 4 AS1211F-M5-04 AS1311F-M5-04 M5 AS1001F-06 6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

MU

22 27 32 38 CJ 7 10 10 14 16 DH 11 13 13 17 19 CI 17 22 27 32 38 DF 4 7 10 12 14 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 DB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

VK300

Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

Rotary Gripper Series MRHQ

A R I 18 6 21 9 5 5 34 23 Side A Side B 726 Rotary Gripper Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4 x M5 x 0.8 depth 8 30 0 -0.062 47h9 41 +2.2 0.2 0 -0.1 5 20.9 opened depth 6 +0.03 0 3 x 4H9 M5 x 0.8 4 x M3 x 0.5 0 -0.1 8 0 0.7 14.9 closed (attachment mounting screw ) Finger closing port (one each on three sides) 4 7 4 x M5 x 0.8 depth 8 15 Max. 7.3 18.8 (two on opposite side) 42

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370