Battery-less

, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 JXCmF series All versions Blank Controller

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

10

41 47.3 39 NT-12M 125 M27 x 2 16 41 47.3 39 CJ2 JCM Note 1) Split pins and flat washers are included.

Cylinder with Lock

17 3 16 4 16 M10 x 1.25 27 27 1/8 143 3.5 6.5 237 40 6 14 22 3 16 4 16 M14 x 1.5 27 27 1/4 157 4.5 9 259 50 7 18 27 4 16 5 16 M18 x 1.5 31.5 31.5 1/4 172 4.5 10.5 288 63 7 18 27 4 16 5 16 M18 x 1.5 31.5 31.5 3/8 184 5.5 12 300 80 10 22 32 5 16 5 17 M22 x 1.5 38 38 3/8 227 7.5 14 371 100 10 26 41 5 16 5 17 M26 x 1.5 38 40 1/2 247 9.5 15 391 Bore size S ZZ 32 149 243 40 163 265 50 180 296 63

Plug-in/Plug Lead: Single Unit

16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650

LVQ

82 75 127 25 168 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 177 60 88 10 7 20 50.8 38.5 45 17-5-77 16 Series LVQ Dimensions With flow rate adjustment, High back pressure spec. with flow rate adjustment N.C. valve Dimensions (mm) S Model LVQ20S-S07-1 LVQ30S-S11-1 LVQ40S-S13-1 LVQ50S-S19-1 LVQ60S-S25-1 (Max.

Modular Type Regulators Series AR

A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16

LEY-OM007

39 17 40 18 101 41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

CY1

CY1L15, 20, 25, 32, 40 (mm) A B d C D FA FB G H HG HI J JK L EA EB GP HA HB HO HP HS HT LD Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 7.5 9.5 12 5 16.6 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 6 13 65 6.5 4 38 39 25 16 5.6 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 80 9 10 44 45 31 20 5.6 9.5 11 16 6.5 26.4 4 7 8.5 54 23 21 M8 x 1.25 10 86 8 14 90 9 18 52 53 39 20 7 10.5 14 20 8 33.6 5 7 9.5

AIR COMBINATION

87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8 126.4 87.6 35.9 41.6 60 28.5 2 30 43.2 24 33 5.5 12 3.5 29 1/81/4 1/43/8 1/43/8 Note) AC25-B 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1L15/20/25/32/40 (mm) d B A L JK J HI HG H G FB FA D C Model LD HT HS HP HO HB HA GP EB EA CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 12 9.5 7.5 75 9.5 M6 x 1.0 14 16 40 6.5 6 3 16.6 5 5.6 16 25 39 38 4 6.5 65 13 6 16 9.5 9.5 86 10 M6 x 1.0 16 18 46 8.5 21.6 5.2 5.6 20 31 45 44 10 9 80 16 11 9.5 86 10 M8 x 1.25 21 23 54 8.5 7 4 26.4 6.5 7 20 39 53 52 18 9 90 14 8 20 14 10.5 100 15 M10 x 1.5

One-touch Fittings

38.5 13.3 13.3 3.4 0.6 5/16 KQ2N05-09 41 13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing O.D.

MNB

13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/4 100 19 120 116

0.4

) DeviceNet System OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-LINK Max.16 stations 16 Note) 16 stations D Note 3) Note 1) Refer to page 56 for details.

MGP

38.5 32 42 37 16 16 20 20 140 140 161 161 80.5 74 89 84 97 97 106.5 106.5 102 102 118 118 37.5 31 34.5 29.5 42.5 36 46 41 20 20 25 25 3.17-14 Compact Guide Cylinder Series MGP MGPM, MGPL 80/100 4-YY depth YL 6H7 depth 10 Dimension of T slot CL b a MLGC X 0.02 X c d 6H7 CNA e CB 7 5 10 CV/MVG 6H7 e 22.5 30 Bore (mm) a 13.3 15.3 b 20.3 23.3 c 12 13.5 d 8 10 CXW 80 100 XX details XX section

MXQ

16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 108 108 108 118 136 169 226 254 282 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 MXQ20-75 MXQ20-100 MXQ20-125 MXQ20-150 Note) Note) Note) Refer to the bottom view of MXQ20

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

CLS

n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8 Courtesy

MNB

n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than the applicable