ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 19

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

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Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

2–4

25 24 5 3 32 31.5 5 to 30 8-32UNC M4 x 0.7 M3 x 0.5 4-40UNC 5 to 30 26.5 17 31.5 22 29 28 5 3 38 37 M6 x 1.0 1/4-20UNC 6-32UNC M4 x 0.7 5 to 50 32 19.5 42 29.5 36 34 5.5 4 47 45.5 5 to 50 10-32UNF M6 x 1.0 1/4-20UNC M5 x 0.8 35.5 22.5 45.5 32.5 40 38 5.5 5 52 50.5 Bore size (mm) KB L M N OB Q RA RB T V W KA 12 16 20 25 10 7.1 3.5 15.5 3.5 6.5 7.5 7 4 0.5 14.9 6 14 9.9 3.5 20 3.5 6.5 7.5 7

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

Air Slide Table Series MXW

34 1 278 5 70 56 Individual -X MXW8-125 121 144 129 138 32 32 25 2 328 6 95 81 MXW8-150 141 176 149 168 32 32 45 2 378 7 120 106 157 Series MXW MXW12/Stroke: 50, 75 mm Operating port 2 x M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 Note) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

KS/KX

5.0 8 26 15 15 12.8 24 17 6 28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

MGG

40 50 63 12 12 12 13 86 86 88 99 114 117 14 17 17 24 32 32 8 10 12 16 20 20 16.2 19.7 19.7 27.8 37 37 M8 x 1.25 9 11 11 11 11 13 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 14 14 M18 x 1.5 Dimensions other than the above are the same as those on pages 17 through 20. 39 Made to Order Specifications Series MGG Variable Stroke Cylinder with Adjustable Retraction 6 MGG XC9 Bearing type Mounting

pa

Series Diaphragm material Volume to be discharged per 1 cycle LVA Turbine oil P-32 Turbine oil 32(Mitsubishi turbine oil 32) Cosmo turbine 32 Kyodo turbine oil 32 Turbine oil 32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated

VHK

VHK-B1A 44.5 14.5 1 27 22 16.5 26 26.2 18.7 9.7 VHS 22 10 8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

KJ

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable

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Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

MY2

x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW 69.2 106.8 135.1 NV 3.4 5.5 6.6 PC 16.5 22.2 29 PD 32 48.7 60.5

Slider Type/Ball Bushing Bearing

Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x