SZ3000

Refer to page 6 for the weight of DIN rails. 18 Cassette Type Manifold Series SZ3000 Manifold Exploded View Type 60 (non-plug-in) manifold U side q e DIN rail holding screw r t w D side DIN rail holding screw y Description No. Part No.

2/3 Port Valve for Various

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.

Modular Type Regulator Series AR

Construction AR10 AR20, 25 t t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Coolant Valve

623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Electric Actuators

q Check the actuator label for model number.This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

LEC-OM071xx

5.8.4 Current Gain Level Setting.5-60 5.8.5 Speed Detection Method Selection.5-60 5.8.6 Backlash Compensation Function.5-61 5.8.7 Torque Reference Filter.5-68 6.

13

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

The controller is sold as single unit after the compatible actuator is set. q Check the actuator label for model number. This matches the controller. q * Refer to the operation manual for using the products.

Hydraulic Filters

M16 x 2 x 50 M16 x 2 x 60 M20 x 2.5 x 65 M22 x 2.5 x 65 4 x N depth Q A 06 G30 SSA20 F (Element removal dimension) Differential pressure indicator G (60) (65) G (30) (34) Blanking cap 08 G35 SSA25 2 x d G E H INLET X OUTLET X' INLET OUTLET OUTLET INLET 10 G40 SSA32 Differential pressure indication switch Differential pressure indicator 12 Bracket mounting base port size 10 to 24 G50 SSA40

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Q Rated voltage CE-compliant: Electrical entry is applicable only for the DIN terminal. 50 60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

SL5200

No gauge port psig/bar unit MPa unit No code Porting Configuration No pressure gauge (Connections: 1/4 inch face seal male) 0 r r e V3 L 1 2 4 10 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa Sample Order Number Port w q w q w q SL5406S e q FV4 FV4

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

VS 8-2/VS 8-4

) 11 173 (Double dual 3-port) 188.5 (3-position) 139.5 (Single) 14 14 14 157.5 8 115 131 12 12 12 SMC 28 Series VS 8-2 S R Construction Construction Metal seal Rubber seal VSR8-2-FG-SVSS8-2-FG-Sr e e r w t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8

Environment

0 i o e r t q u !1 !2 !3 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators SZ3 LOZ 1 60 10 C6 5 Rated voltage CE-compliant 5 24 VDC Nil Clean series CE-compliant Q Actuation type Made to Order Nil 2 position single solenoid Main valve fluororubber (Refer to page 411.)

New

e q VXF26D<q e q Component Parts Component Parts No.

IDG

IDG50L (Type B products group) IDG30L (Type B products group) 0 0 P1 = 0.3 MPa P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) 10 10 20 20 P1 = 0.5 MPa P1 = 0.5 MPa 30 30 40 40 P1 = 0.7 MPa P1 = 0.7 MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy