Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

Fieldbus system PROFINET compatible SI Unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

240

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the operation manual for using the products.

Low Friction Cylinders Series MQ

D Note) Be sure to use a flat washer for the A type mounting. b) Mounting type B (when using the cylinder tube threads) E t E t REA REB Compatible Mounting Bolt Dimensions Mounting type A Mounting type B REC Model Mounting bolt size E (mm) C (mm) D: Bolt length (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30

Fieldbus system PROFINET compatible SI Unit

Green ON IO-Link device communicating Red ON Short circuit (L+ or C/Q) OFF Input signal OFF Orange ON Input signal ON Digital input Red ON Short circuit (L+) OFF Output signal OFF Orange ON Output signal ON Digital output Red ON Short circuit (L+ or C/Q) Table. 9-16 Status LED 1, 3, 5, 7, for Pin No. 2 I/Q (EX245-LA1, Port class A) Function LED status Description OFF I/Q Input signal OFF

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

KG

(mm) Model L Q Weight (g) 2-applicable tubing M2 D KGL04-00 18 4 6 8 10 16 17 18.5 21 10.4 4.5 4.2 4.2 6 KGL06-00 20 12.8 5.3 11.4 9.0 6 KGL08-00 23 15.2 6 21.6 14.9 10 KGL10-00 26.5 18.2 6.8 35.2 25.0 17 KGL12-00 28.5 20.9 7.5 50.2 39.7 21 12 22 KGL16-00 34 26.5 10 100 (84) 29 16 25 K Note 1) D: Max. diameter Note 2) ( ): Values for nylon.

48

D-G

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

D B Reed auto switch D-A93 Solid state auto switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid

MXS

Electrical entry Specifications D-F9BV With light, 2 wire Solid state switch D-F9NV With light, 3 wire, Output: NPN Perpendicular D-F9PV With light, 3 wire, Output: PNP * The auto switch for buffer must be ordered separately. With buffer With end lock 3.11-26 Air Slide Table Series MXS Construction y i o !5 u !9 !7 !8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

-fl Seies

qn D N coreclor.

Compact Guide Cylinder

D-G

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Compact Cylinder

F 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

VXA21/22

Refer to table q for configuration.