Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275
(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10
Servo amplifier Driver Controller (Note 6) CN1 (Note 6) (Note 2) 21 DICOM 24VDC (Note 4) CN1 Trouble (Note 5) 20 46 DICOM 48 ALM RA1 Zero speed detection DOCOM 23 ZSP (Note 3) Emergency stop Servo-on Reset Speed selection 1 Speed selection 2 EMG SON RES 42 15 19 (Note RA2 Limiting speed 25 VLC RA3 Ready (Note 10) 49 RD SP1 SP2 41 16 RA4 10m max.
Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30
3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5 M12 x 1.75 10.5 18 10.5 18 M14 x 1.5 19 8.5 19.5 6 Rc1/8 46 152 14.5 15 75 66 26.5 5H9 5.5 M8 x 1.25 12 55 33 5H9 5.5 25 Rotary Table Series MSQ
Refer to "Installation and Removal of Tubing" on page 15.)
Refer to "Installation and Removal of Tubing" on page 15.)
Refer to "Installation and Removal of Tubing" on page 15.)
D-M9 D-M9W n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-M9V D-M9WV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9A n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9AV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-A9 n 15 + 40 (n 2) 2 (n = 2, 4
Parameter list (Driver side) 15 6.
/64 2.76 1 3/8 2.34 4 1/4 2.72 8.02 1 1/2 2 7/16 2 5/8 2.40 M24x1.5 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.10 5/8 27/64 3.32 1 3/8 2.34 4 1/4 2.72 8.02 2 1/16 2 7/16 2 5/8 2.40 M24x1.5 (in) Bore (in) TN XT SN d mm NT ND 150 (1.5) 5/8 1 15/16 2 1/4 1.81 M16x1.5 1/4-20 9/32 200 (2) 7/8 1 15/16 2 1/4 1.81 M16x1.5 5/16-18 7/16 250 (2.5) 1 1/4 1 15/16 2 3/8 1.69 M16x1.5
Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12
number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 7seg Display letter 11seg Supplementary information : Do not work [Toggle output command] Value Item Remarks CH1 0 1 CH2 Measurement value 2 CH3
3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series
20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.
+0.1 23 2 34H9 +0.062 depth 4 0 27 Misc. 30 4-M6 x 1 thread depth 7 (Thread for mounting attachment) Rc 1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D
14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x 1.25 thread depth 15 (Mounting hole) 27.5 104.5 4-M8 x 1.25 thread depth 16 (Mounting thread) 2-M8 x 1.25 thread depth 15 75.5 Bottom through hole dia. 6.8 (Mounting hole) (Mounting hole) 56.5 37.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way
Internal hold External hold MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6MPa Pressure 15 15 Holding force (N) 0.6MPa Holding force (N) 0.5MPa 0.5MPa External hold 10 10 0.4MPa 0.4MPa 0.3MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6MPa 30 30 Internal hold Pressure 0.6MPa 0.5MPa
16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36 20 21 Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-60 5 Speed Controller for Low Speed Operation With One-touch Fitting, Elbow Type/Universal Type
Soft stroke limit 15 The program is about to exceed the stroke length set by the parameter. Over current 20 Three times the rated current or more is flowing into the driver unit. Over load 21 The driver unit continuously received a current exceeding the rated current for a prescribed time or longer. Over speed 22 The controller exceeded the maximum operational speed.