With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS131F-M3 AS121F-M3 M3 x 0.5 6, 10, 16, 20 AS131F-M5 AS121F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

PFxx-OMP0001CN

[P_1][n_1] [] [H_1][] OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 500 L/min -31No.PF-OMP0001CN-F b. () [P1L][n1L][] () [P1H][n1H][] [ H1][] OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 500 L/min -32No.PF-OMP0001CN-F c. ()() [AC1][] () () 09 L 3 (3) [P1.1][n1.1][] (3) [P1.2][n1.2][] () -33No.PF-OMP0001CN-F (3) [P1.3][n1.3][] OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -34No.PF-OMP0001CN-F

44

(inch) L Model KKA 1/8" (3.18) KFG2N-01 1.9 8 7.8 H 5/32" (4) KP KFG2N-03 1.9 8 7.7 1/4" (6.35) KFG2N-07 4.6 12 9 LQ 5/16" (8) KFG2N-09 6.7 14 10.1 L MQR 3/8" (9.53) KFG2N-11 10.7 17 11.7 T 1/2" (12.7) KFG2N-13 13 19 12.8 IDK 331 KFG2 Series Applicable Fluid List How to Read the Table : Completely unaffected or largely unaffected. : May be slightly affected, but, dependent upon condition,

PFxx-OMO0004CN

[P_1][n_1] [] [H_1][] , OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -34No.PF-OMO0004CN-E b. () [P1L][n1L][] () [P1H][n1H][] [ H1][] OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMO0004CN-E c. ()() [AC1][] () () 09 L 3 (3) [P1.1][n1.1][] (3) [P1.2][n1.2][] () -36No.PF-OMO0004CN-E (3) [P1.3][n1.3][] OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -37No.PF-OMO0004CN-E d.

A_HEC-OM-J017

High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

HEC-OM-S008

High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

DOC1020530

PA07 . 17 4.6 Auto tuning modePr.PA08 . 18 4.7 Input signal automatic on selectionPD01 . 18 4.8 Parameter setting by MR Configurator2TM . 19 4.8.1 Parameter reading . 20 4.8.2 Parameter setting (Ex. Control mode change) . 20 5.

NAIV

241 4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

Piping: 20 (Body Ported), Stations: 18 Stations

Piping: 20 (Body Ported), Stations: 16 Stations

Piping: 20 (Body Ported), Stations: 2 Stations

Piping: 20 (Body Ported), Stations: 3 Stations

Piping: 20 (Body Ported), Stations: 4 Stations

Piping: 20 (Body Ported), Stations: 5 Stations

Piping: 20 (Body Ported), Stations: 6 Stations

Piping: 20 (Body Ported), Stations: 8 Stations

Piping: 20 (Body Ported), Stations: 10 Stations