ZSE2/ISE2

Easy and simple wiring Connector type 16-6-7 2 Series ZSE2/ISE2 How to Order Operating pressure range/ Setting pressure range Piping specifications Single mounting R 1/8, M5 x 0.8 01 T1 Single mounting NPTF 1/8, M5 x 0.8 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) thread.

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

CU

50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

600 14 17 194 15 40 206 30 20 209 221 U up to 750 22 26 246 23 60 264 42 30 269 287 CX L RR up to 750 22 26 246 23 60 264 42 30 269 287 Z + Stroke CZ ZZ + Stroke Center trunnion(T)/Locking at head end (Hl) Hl Rl/ Wl (mm) Port Cushion valve Stroke range Bore size (mm) Z + 1/2 + Stroke Z Z TZ TY TX TDe8 TT 32 40 50 63 80 100 up to 500 97 89 74 49 50 12 17 up to 500 106 93 95 58 63 16 22 TDe8

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CM2

A E1 L R1 NZ NX MM +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 36 Y-020B Y-032B Y-040B 9 46 16 20 25 5 14 18 M8 X 1.25 CDP-1 20 9 C9 type for pivot 38 9 48 18 20 25 5 14 18 M10 X 1.25 CDP-1 25,32 9 C9 type for pivot 55 12 68 22 24 49.7 13 25 38 M14 X 1.5 3 X 18l CDP-3 40 16 Clevis pins and snap rings (cotter pins for bore size 40) are attached.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

A B D +0.058 0 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 AD-EI-20 AD-EI-25 AD-EI-32 AD-CHN-40 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 Y-02 Y-03 Y-04C YHN-04 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 16 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 12 12 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 3.2 x 16l

NCA1

1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

Air Cylinder NCA1 Series

1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

Two Hand Control Valve

2 x M5 x 0.8 Thread depth 5 26 9.5 Bracket mounting dimensions 66 54 7.5 30 10.4 30 42 10.4 2 x 6.5 2 x 6.5 42 8 54 66 Back side mounting Bottom mounting 1684 VR51 Series Specific Product Precautions 1 Be sure to read this before handling the products.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Slider Type LEKFS Series With a 4-row circular arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18

High Power Cylinder:

27 30 5.8 to 8.8 6.8 to 11.3 Axial foot GA Rc(PT)P H GB F Rc(PT)P K F Effective Thread H2 A WH NN I MM H1 NE D LY ND NB 4-LD LH LT NF E 10 E JD N 10 JC N NA X Y X Y S+Stroke LX LZ LS+Stroke ZZ+Stroke (mm) Bore (mm) 20 25 32 40 Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 I 26 31 38 47 F 16 16 19 21 A 18 22 22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

Aluminum High Vacuum Angle Valve

Rc1/8 Rc1/4 Pilot port size XLFV Rc1/8: Port 1(P), M5: Port 3(R) M5: Port 1(P), Port 3(R) XLF 0.45 1.1 1.6 3.0 4.8 0.25 10 18 Weight (kg) XLFV 0.49 1.14 1.66 3.06 4.86 0.29 10.1 18.1 Note 1) Conductance is the value for an elbow with the same dimensions.

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3