1.1

[Piping adapter] AP IDF Size Applicable Thermo-cooler Thread type and port size Symbol Material Quantity per set Female side B Male side A HRG001HRG002HRG005HRG010HRG015NPT 1/2 R 1/2 601 Copper alloy 2 HRG010HRG015603 NPT 3/4 R 3/4 Note) Refer to page 33 for dimensions.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

155

Voltage symbol 24 VDC V100-61-5-05 DC 24 VS R NL LED R 12 VDC V100-61-5-06 DC 12 VS 100 VAC V100-61-4-01 100/110 VS NL: Neon bulb, R: Resister V: Varistor LED: Emitting diode, R: Resister V: Varistor 200 VAC V100-61-4-02 200/220 VS 110 VAC V100-61-4-01 100/110 VS 220 VAC V100-61-4-02 200/220 VS Operating Environment 240 VAC V100-61-4-07 240 VS Caution With Light / Surge Voltage Suppressor

AR Series Modular Type Regulator

r q w w Component Parts No.

AMR3000 to 6000

S AMR 4 0 00 02 E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC 100 VAC 200 VAC Conduit terminal 24 VDC A01-01-63 A01-02-63 A07-52-63 A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

Direct Operated Precision Regulator Modular Style Series ARP3000 1

ARP3000-02 VY1 G ARP3000-02BG PPA How to Order JIS Symbol AL ARP 3000 BG R 02 Option Direct operated precision regulator Nil None Reverse flow R Thread type Accessory Nil N F Rc NPT G Nil None With bracket With pressure gauge B G Pressure gauges are shipped together with regulator, (but not assembled).

VZM400

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-35 Series VZM400 How to Order S 01 01 0 VZM45 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push botton selector Rc 01 1 8 NPT N01 1 8 G F01 1 8 Roller lever 01 Black One Way Roller Lever 02 Green Straight plunger

Electro-pneumatic Proportional Valve Series VEF/VEP 1

03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2 Rc 3/4

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Electro-pneumatic Proportional Valve Series VEF/VEP

(3 port) P(1) port R(3) port F.R.L.

70pvpump

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread