High Power Cylinder Series RHC

127 196 Effective cushioning stroke (mm) 80 80 80 80 80 80 80 80 Lubrication Not required (Non-lube) JIS Symbol Up to 1000 st: , 1001 to 1500 st: +1.8 0 +1.4 0 Stroke length tolerance Mounting Basic style, Axial foot style, Rod/Head side flange style REF Stroke (mm) Max. stroke Bore size (mm) Minimum stroke (Recommended) (1) Standard stroke (2) 20 1500 250 up to 700 25 1500 250 up to 700

High Power Cylinder Series RHC

12 (120) 1500 25 25 to 700 80 21 (210) 1500 32 32 to 1000 80 33 (330) 1500 40 40 to 1000 80 47 (470) 1500 50 50 to 1200 80 84 (840) 1500 63 63 to 1200 80 127 (1270) 1500 80 80 to 1400 80 Symbol 196 (1960) 1500 100 100 to 1500 80 Note 1) When the standard stroke is exceeded, it is outside the guaranteed range.

CG5-S

22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 23 130 32 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 CG-E080SUS 258 23 131 32 Plug bolts are installed before shipment from factory.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Compact Guide Cylinder

80 and 100).

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

C92

Bore size (mm) Max. stroke Standard stroke (mm) MB1 32 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 CP95 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C92 100 1900 25, 50, 80, 100, 125,

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Series MXP Precision Air Slide Table

20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150

Table of Contents

VQ0 VQ0 0.59 0.50 10.5 Up to 40 VQ1000 1.0 0.84 11 Up to 50 VQ4 VQ2000 2.7 2.3 16 Up to 80 Flip type demonstrates space-saving effect. Cassette type enables flexible, speedy station increasing/decreasing.

Vacuum Module Series ZX

ZCUK PV, V port size Electrical entry AMJ Nil Nil M5 x 0.8 M6 x 1 (Option) Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Y L C CL CN AMV Output specifications NPN Open collector 30 V 80 mA 15 AEP 55 PNP Open collector 30 V 80 mA HEP Vacuum pressure setting Related Caution Observe the following precautions when setting the vacuum pressure.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

2-Color Display Digital Flow Switch Series PFM

mA Maximum load current 28 VDC (at NPN output) Maximum applied voltage NPN output: 1 V or less (at 80 mA) PNP output: 1.5 V or less (at 80 mA) Internal voltage drop 1 s (50 ms, 0.5 s, 2 s can be selected.)

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

New New Long Stroke MHSL3 Opening/closing stroke more than twice the standard (MHS3) Stroke mm Dia.: Open Closed 10 (4) 10 (4) 12 (6) 16 (8) 20 (8) 28 (12) 32 (16) 40 (20) 48 (24) 64 (32) Open Cylinder bore size mm Height mm Weight g 16 20 25 32 40 50 63 80 100 125 80 135 180 370 550 930 1,550 2,850 5,500 11,300 43.5 46 49 58 64 77.5 89 116 135 175 Closed Gripping of different diameter work

High Vacuum L Type Valve

Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal