Digital Flow Switch (Integrated display type) 1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.
*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.
] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure
ON Response Time Start-up Speed 0.05 100 90 0.04 80 Start-up speed (MPa/msec) ON response time (msec) 70 VXFA23A 0.03 60 50 0.02 40 VXFA21A VXFA22A 30 VXFA22A VXFA21A 0.01 20 10 0 0 0 500 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm) Piping length to the pilot valve (mm) 0.05 100 90 80 0.04 Start-up speed (MPa/msec) ON response time (msec) VXFA25A, B 70 VXFA23A VXFA25A,
S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type
100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.
/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed
Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.
I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?
I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?
6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?
20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(
HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP Nil D 100 to 240 VAC 24 VDC Output transistor mode COUNT PRESET FUNC. LEFT RIGHT DOWN Nil P NPN open collector output SEL.
Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.
temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.
60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5
RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5
60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5
0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40