Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Soft Start-up Valve

70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 -29- Air operated type: AVA00---A Dimensions (mm) Standard specifications Port size Pilot A B C D E1 E2 F G H Model 1(P) 2(A) 3(R) Port size AVA2000-02--A 1/4 1/4 1/4 1/8 66 65.6 47 24.5 20 20 33 33 Width across flats 22 AVA3000-03--A 3/8 3/8 3/8 1/8 76 65.6 50 29.5 20 20 38 38 Width across flats 24 AVA4000-04--A 1/2 1/2

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 41 54 75 85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250

Plate Cylinder

20 12 14 16 20 20 30 314 265 216 166 117 68 491 OUT 15 42 521 440 360 280 199 119 804 OUT 24 Spring return 56 824 698 573 447 321 195 1257 OUT 30 76 1327 1131 935 738 542 346 1963 OUT 47 113 2069 1757 1446 1134 822 510 3117 OUT 61 30 235 197 159 121 83 46 378 IN 15 42 413 348 283 218 153 88 650 IN 24 Spring extend 56 683 578 472 366 261 155 1056 IN 30 76 1107 942 777 613 448 283 1649 IN

MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Short Stroke Electric Actuator Series LX

) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1

Series LX Acceleration Time Guide

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 8 LXFH-100 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (

Moisture Control Tube

RH) 20 4 2.5 Min. bending radius 2 (mm) O.D.

IP8001 Series

-Apply the correct input current 4 to 20 mADC. 14,15 -Air is leaking from the piping. -Check the piping and fitting to stop leaks. 75-Operation mode is different. -Change the operation mode(auto, 27 manual mode). -Fixed orifice and nozzle are -Inspect and clean the pilot valve. 9-Fig.3 clogged. 75-Balance current is not adjusted.

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38

AC Servo Motor Driver (Pulse input type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.