Manifold Specifications

1) (mm) 10 9 8 7 6 5 4 3 2 Stations L1 260.5 248 223 210.5 198 185.5 160.5 148 135.5 L2 250 237.5 212.5 200 187.5 175 150 137.5 125 L3 232 216 200 184 168 152 136 120 104 L4 14 16 11.5 13.5 15 17 12.5 14 16 (mm) 20 423 412.5 392 15.5 19 18 17 16 15 14 13 12 11 Stations L1 398 385.5 373 360.5 335.5 323 310.5 298 273 L2 387.5 375 362.5 350 325 312.5 300 287.5 262.5 L3 376 360 344 328 312 296

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

NAAMS Standards Compliant

200 250 300 0 50 100 150 200 250 300 Arm length [mm] Arm length [mm] Bore size: 63, Arm length: 200 mm, Operating pressure: 0.5 MPa With an arm length of 200 mm and an operating pressure of 0.5 MPa, according to the graph, the maximum clamping force is 2000 N.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Standard length is 300 mm, but the following lengths are also available.

Large Size Vacuum Module: Series ZR

(mm) Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) Model ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 0.132 0.134 0.136 0.154 0.156 46 78 95 150 185 22 38 54 62 84 1.0 1.3 1.5 1.8 2.0 ZA ZX Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZR Nozzle dia.

air-filter-e

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

High Speed 2 Port Valve SX10 Series

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) 100 Nil Without lter F With lter Note) Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port N.C.,

ITV

0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Supply pressure (MPa) Series ITV205 Linearity Hysteresis Repeatability 1.0 0.9 1.0 0.5 Output deviation factor (%F.S.)

Air Preparation Equipment

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Bag Filter

When making a selection, designate the flow rate as 300 L/min when viscosity is equivalent to water.

3 Port Air Operated Valve Series SYJA300

76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 38.7 Approx. 300 (Lead wire length) 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 4-4-61 for dimensions with connector cable.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Free Mount Cylinder Series CU

Grease pack part no.: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RZQ Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution 1. For CUX10, up to 0.1 Nl/min (ANR) of internal leakage is anticipated due to cylinder structure.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features 3 2-Color

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(M) 54.5 (Lead wire length) P 1 3 R Cover diameter 1.5 Cross section 0.23 mm2 89 56 <61> 300 78 Indicator light P 1 3 R < >: AC Formula L1 = 16n + 11 L2 = 16n + 22 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 43 54 75 85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5