51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

HRX-OM-Z002

/60Hz(note2) kW 1.3/1.6 Heating capacity(Total of ch1 and 2) 50/60Hz(note3) CH10.1CH20.5 Temperature stability(note4) Circulating fluid system Rated flow 50/60Hz(note5) L/min CH121/26CH22/2 Pump capacity Maximum flow rate 50/60Hz L/min 29/38 Maximum pump head 50/60Hz m 34/50 Minimum operarating flow 50/60Hz6) L/min CH115/15CH21/1 Tank capacity(Total of ch1 and 2) Fluid outletFluid return

MK

Since it can be locked at any position, it can deal with freely the changes of thickness of a workpiece. 32 50, 75 100, 125 150 40 Single knuckle joint Double knuckle joint (with pin) Dog for limit switch Dog fitting CLK1 Standard 50 Double clevis Spring rod 63 40 50, 75 100, 125 150 With magnetic field resistant auto switch CLK1G 50 63 With magnetic field resistant auto switch Series CLK1

IMPACT BLOW GUN

.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.

MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

•

siz~ ,t~ , ~8 , ' 0"32 jS4C ~ OQ . 50 150 "'2O or more:Special order ~ i ListO Pad DI. -Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

Fieldbus System

L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.

MHL2

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Vacuum Module Series ZX

ZX 36 A VJ10 1.8 (Mounting hole) ZR Rated voltage Lead wire length Symbol Rated voltage Lead wire color Symbol L mm ZM Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.) 600 3 Gray (2 pcs.)

15

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

ChemicalThermo-con

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.