Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

SYJ300/500/700

circuit (24, 12 VDC only) SY100-30-2AFor 200 VAC: T VQZ For other voltages of AC: SY100-30-3APower saving circuit is not available in the case of W type.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

1.63

34 40 46 58 92 113.5 116.5 116.5 135 135 47.5 66.5 64.5 60.5 74.5 67.5 62 63.5 76.5 76.5 85 85 17.5 16.5 24.5 20.5 24.5 17.5 25, 50, 75, 100, 125, 150, 175, 200 Nil TN TF P Bore size (mm) PW Q R S T U V X YY YL Z MM ML NN OA OB OL 20 25 32 40 50 63 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30 14 16 20 20 26 30 64 68 78 92

Vacuum Module Series ZX

Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly. Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. Nil 0.3 m (Standard) SP 6 10 15 20 25 30 0.6 m 1 m 1.5 m ZCUK Ordering example) ZX100-K150ZECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Series LX Acceleration Time Guide

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 8 LXFH-100 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

C92

45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190

Electric Actuator Miniature Rod Type Miniature Slide table Type

25 50 75 Weight [kg] Basic 0.24 0.29 0.34 0.47 0.55 0.65 Compact 0.41 0.49 0.59 Note 1) Pushing force accuracy is LEPY6: 30% (F.S.), LEPY10: 25% (F.S.).

LEC-OM02904

USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

Filter for Cleaning Solvent Quick Change Filter Series FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply

Modular Type Regulator Series AR

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

Sine Rodless Cylinder Series REBR Direct Mount Type

Cushion stroke Max. operating pressure Pv (MPa) Allowable load weight Wv (kg) Stroke (mm) Model Model 25 30 30 30 REBH15 REBH25 REBHT25 REBHT32 7.0 18.5 18.5 30.0 REBH15 REBH25 REBHT25 REBHT32 0.65 0.65 0.65 0.65 75 Series REBH Stroke Adjustment The adjustment bolt is adjusted to the optimum position for smooth acceleration and deceleration at the time of shipment, and should be operated

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

%silltr

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?