XM, XY

FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 8 IY-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 10 IY-G03 41 10.5 20 30 M10 x 1.25 12.8 14 10.5 20 30 M10 x 1.25 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 0.3 0.5 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04

Low Profile Guide Type

Bore size (mm) 10 15 25 No. RB0805-X552 RB1006-X552 2.

Compact Cylinder

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 45 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 17 50 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 19 63 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 21 80 65 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 13 29 M22 x 1.5 35 30

KJ

25.5 33 26 32 32.5 32 34 36 37.5 37 39 41 42 43 44.5 46.5 46.5 48 50 4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15 22.5 14.5 20.5 20.5 18 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 2.3 2.5 2.3 2.8 3.6 2.3 15.5 15.5 8 10 8 10 10 16.5 16.5 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 Connection thread 1 8 K 1 4 13.2 17 10 19 1 4 14.29

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10

/

(mm) Port size Av x 10-6m2 Cv converted 10 10 15 10 15 20 25 35 40 50 1/4 (8A) 1.9 2.4 4.5 2.4 5.5 9.5 13 23 31 49 46 58 110 58 130 230 310 550 740 1200 VXED2130-02 VXED2130-03 VXED2140-03 VXED2130-04 VXED2140-04 VXED2150-06 VXED2260-10 VXED2270-32 VXED2380-40 VXED2390-50 420 0.5 3/8 (10A) 670 500 670 1150 1650 5400 6800 8400 1.0 0.5 Thread (Nominal size) 0.02 1/2 (15A) 1.5 3/4 (20A) 1 (25A

Compact

ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1

REC

8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 32 M10 x 1.25 Up to 1000 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 40 M14 x 1.5 Up to 1000 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 NN P RR S U Z ZZ NA Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 30 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230

HRX-OM-Q026

25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-15: Cooling Capacity (

Thermo-chiller

HRLE090-A-20/40 HRLE090-A-20/40 [50 Hz] [60 Hz] 12 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C 6 6 Ambient temperature 40C 4 4 Ambient temperature 45C 2 2 Ambient temperature 45C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] * The cooling capacity is the sum of

VQZ1000/2000/3000

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

48

[Nm] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.13 0.10 0.08 0.06 0.04 [kg] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.9 0.7 0.5 0.4 0.2 16 (12 x 2) 0.14 0.11 0.09 0.07 0.04 16 (12 x 2) 0.9 0.7 0.6 0.4 0.2 20 (16 x 2) 0.27 0.22 0.16 0.10 0.07 20 (16 x 2) 1.3 1.0 0.8 0.5 0.3 25 (20 x 2) 0.54 0.45 0.34 0.21 0.15 25 (20 x 2) 2.3 1.9

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

Smooth Cylinder

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

JXCx-OMU0004

[mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6 30%F.S.LEP10 25%F.S.