MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1) 200 (12) 200 (6) Load eccentricity (l mm) (3) Selection graph L: Overhang (the distance from the cylinder

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MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Series MXP Precision Air Slide Table

/My max. 0.3 Stroke (mm) Stroke (mm) 10 15 20 25 30 5 25 30 10 15 20 5 0.2 MXPJ6 3.5 2.6 2.3 1.4 MXP10 4.2 8.5 1.7 6.3 50 100 200 300 500 700 MXP12 9.8 17 13 4.5 Average speed Va mm/s Collision speed V mm/s MXP16 26 41 28 12 1 Nm = 0.7375 ftlbf Note) Average speed is used at static moment calculation. Collision speed is used at kinetic moment calulation.

ZR

4 ZCU Standard (Without options) M3 x 0.35 x 70 4 [For ZSE4 spec.] [For ZSE4 spec.] With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

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Series Variations Model Bearing Bore size Stroke [mm] Cushion Piston speed Port size Mounting direction JMGP 12 (10 x 2) 10, 20, 30, 50, 100 M3 x 0.5 16 (12 x 2) 20 (16 x 2) 20, 30, 50, 100, 150 M5 x 0.8 25 (20 x 2) 50 to 300 mm/s Top 32 (25 x 2) Rubber bumper on both ends Slide bearing Bottom 40 (32 x 2) 1/8 (Rc, NPT, G) 50 (40 x 2) Rear 25, 50, 100, 150, 200 63 (45 x 2) 80 (56 x 2) 50 to

High Speed Pilot Operated

Ex. 1) Cable length: 300 mm DXT1215T-5W1U-01m(-X1) Symbol for electrical entry MNon-locking push type Push the manual override button all the way down. 2.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

IRV Flow rate (L/min (ANR)) Inlet pressure (MPa) VEX ARP30(K) ARP30(K) Rc 3/8 SRH 0.50 0.25 SRP 0.45 0.40 SRF Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point VCHR 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1/2 VEA 0.50 0.25

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

IR Flow rate (L/min (ANR)) Inlet pressure (MPa) IRV ARP30(K) ARP30(K) Rc 3/8 VEX 0.50 0.25 SRH 0.45 0.40 SRP Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point SRF 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT Rc 1/2 0.50 0.25

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35

4/5 Port Air Operated Valve Series SYJA3000 1

Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In the case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Double acting, Single rod Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.5 MPa Minimum operating pressure Note 1) 0.005 MPa 10 to 80C Ambient and fluid temperature Cushion Rubber bumper (Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300

MXH Series Compact Slide

Vertical Horizontal l: Load eccentricity m Mounting position m L L to 100 to 300 Maximum speed mm/s to 500 to 100 to 300 to 500 Load eccentricity lmm 100 50 200 100 50 200 100 50 200 1 2 3 4 5 6 7 8 9 10 11 12 Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction .

3 Way,3 Port Solenoid Valve NVZ Series

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

4/5 Port Air Operated Valve SYJA3000 Series

Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

SYJA3000

double 2 position double 2 position double 3 position (B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300

NVZseies

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

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Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

Compact Cylinder

Auto switches are shipped together, (but not assembled). 2 JCQ Series Specifications Bore size [mm] 12 16 20 25 32 40 50 63 80 100 Action Double acting, Single rod Fluid Air Proof pressure 1.0 MPa Maximum operating pressure 0.7 MPa 1 Minimum operating pressure 0.07 MPa 0.05 MPa Ambient and fluid temperature 5 to 60C Lubrication Not required (Non-lube) Piston speed 50 to 500 mm/s 1 50 to 300