AC Servo Motor Driver (MECHATROLINK-III type)

5 LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

AIR CYLINDER

3 1/5 Doc. no. CS2*-OM0237Q PRODUCT NAME AIR CYLINDER MODEL / Series / Product Number 25A-CS2*125160-** 3 2/5 Contents 1. Safety Instructions P.2 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Note 5) Consult P/A regarding drip-proof specifications (equivalent to IP54) .

ZSE F/ISE

Note 5) Value clear 0.01 psi in psi display.

Gun Type Ionizer

Blow setting Trigger setting 0 Trigger linked 1 1 Trigger lock 2 Continuous blow 3 s 3 5 s OFF timer 4 7 s 5 Trigger linked 5 6 Trigger lock 7 Pulse blow 3 s 8 5 s OFF timer 9 7 s Selection of blow setting M Continuous blow M Pulse blow Blows ionized air continuously. Pulse blow saves air.

MHL2

MHL2-25D MHL2-25D1 MHL2-25D2 SMHL, #4 (#4+#5) SMHL2B, #3 SMHL2B, #4 (#4+#5) 2.2-10 Series MHL2 Dimensions MHL2-32Dl 16 14 2-M8 X 1.25 Thread depth 11 (Mounting thread) D Closed J 22 A cross view (Fingers closed) C B 6H9 +0.030 0 Depth 8 64 6.45 5 5 7 4-M8 X 1.25 Thread depth 16 (Mounting thread) +0.030 0 6H9 Depth 8 Dimensions of auto switch mounting groove (Enlarged view) 35H9 +0.062 0

AC Servo Motor Driver (MECHATROLINK-II type)

5 LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

Precision Regulator

Note 5) Not applicable to both high and low temperature environments.

Fluoropolymer Tubing Variations

32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Plate Cylinder with Lock Series MLU

1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

MGZ Series

Stroke (mm) Refer to the standard stroke table on page 5.

PFMB.eng

Connect the fluid flow in the correct direction. [ 250] 250 L/min (PFMB7501) [ P_1] Set value of OUT1 Panel mounting (Only PFMB7201) Refer to the diagram and table below for mounting details. Refer to the dimension from SMC website (URL http://www.smcworld.com) for panel thickness and panel mount cut-out dimensions.