100

A 108 75 22.2 40 9.8 7.9 26.6 188 124 55 Vacuum (2/V) port thread type symbol Nil: Rc thread F: G thread N: NPT thread 2 x 4.1 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Silencer assembly (Included) 66 Exhaust direction 3 x 4.4 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust port thread type symbol Nil: Rc thread F: G thread N: NPT thread Pressure

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

ITV

1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

3 Port Solenoid Valve Metal Seal Series VZ200 1

1 3 Port Solenoid Valve Metal Seal Series VZ200 Model V100 Large flow capacity Low power consumption: 1.8 W (75 mA, 24 VDC) Plug connector One-touch wiring of plug connectors Common pilot exhaust subplate mounted and manifold Individual exhaust Piping Choice of pilot valve exhaust Type of actuation Common exhaust VZ212 SY VZ212 N.C. Body ported VZ222 VZ222 N.O. N.C. N.O.

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

AC Servo Motor Driver (CC-Link Type)

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

AC Servo Motor Driver (CC-Link Type)

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(n = 2, 4, 6 ) 75 + 55 (n 2) 20 + 50 n 2 2 D-B59W 20 75 15 (n = 2, 4, 6 ) D-A3 D-G39 D-K39 D-A44 35 100 10 35 + 30 (n 2) 100 + 100 (n 2) n: Number of auto switches Theoretical Output Mounting Unit (N) Caution Operating pressure (MPa) Bore size (mm) Piston area (mm) Rod size (mm) 1 1.5 2 2.5 3 3.5 Operating direction 1.

Air Fittings & Tubing

F (inch) Part No.

Electric Actuator

The above graphs show examples of when the duty ratio is 75% and 50%. 4 Series LEJ Work LoadAcceleration/Deceleration Graph (Guide) LEJS63/Ball Screw Drive: Horizontal 1 Kg = 2.2 lb LEJS63;A LEJS63;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 50% Duty ratio: 50% 10 10 5000 5000 Duty ratio: 75% Duty ratio: 75% 0 0 0 40 10 20 30 0 30 40

Air Slide Table Series MXP

Table Deflection (Reference Values) Table displacement due to pitch moment load Displacement on A when load is applied on F . Table displacement due to yaw moment load Displacement on A when load is applied on F . Table displacement due to roll moment load Displacement on A when load is applied on F .

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

XLAQ/XLDQ

U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(PF2A7 0) 2% F .S. (PF2A7 1) 2% F.S. Monitor unit 1% F.S. 1 digit (Fluid: Dry air) 1% F .S. 1% F .S. (Fluid: Dry air) 1% F.S. Monitor unit 0.1% F.S. Monitor unit Monitor unit 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.3% F.S.

HRL

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

check block 2 position 3 position/exhaust center R1 P R2 R1 P R2 R1 P R2 R1 P R2 VQ1000FPG C4 M5 F Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in