HRX-OM-R016

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

(Free) flow Flow rate (l/min (ANR)) 1710 1580 920 460 390 790 100 230 26 24 14 7 6 12 1.5 3.5 Effective area (mm2) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported Bracket

HRX-OM-W038

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Plug-in/Plug Lead: Single Unit

Note 3) 2-6-23 Base Mounted Series VQ5000 Kit (Lead wire cable) L 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R2 5 R1 3 1 P 2-G1 (Electrical entry) SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port Cable length L 0: 600 mm L 1: 1500 mm L 2: 3000 mm U D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2

HRX-OM-O021

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

HRX-OM-R005

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

VFRA3000

EX) VV5FR4-10-l1-l VV5FR4-10-l2-l Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs.

155

D-M9P (Example) Nil Lead wire length 0.5 m 1 m M 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Manufactured upon receipt of order as standard.

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

Brake mechanism added

Applicable bore size A1 E1 D1 L1 MM R1 U1 ND NX NZ L Split pin size Flat washer size Shaft diameter: NDH10 Split pin Hole diameter: NDd9 L L MM Flat washer: Polished round D1 D1 MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1 NX NZ L A1 L1 U1 A1 L1 U1 Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

DO w DI Blue L e L 10 ISE7m/7mG Series Dimensions Without bracket Bracket A (Interchangeable with ISE70/ISE75(H)) (Part no.: ZS-50-A) 48 49 10 (40.1) 34 (26) 15 14 6.5 80.4 70.4 (11.4) 8 1.6 46 25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no

VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220

A-HEC-OM-J004

(mgFe/L) 1.0 or less Copper (mgCu/L) 0.3 or less Sulphide ion (mgS2-/L) None detected +/L) 1.0 or less Ammonium ion (mgNH4 Residual chlorine (mgCl/L) 0.3 or less Free carbon (mgCO2/L) 4.0 or less Filtration (m) 5 or less 4.2 Piping 4-5 A_HEC-OM-J004-4 Chapter 4 Set-up 4.2.3 Preparation of Recirculating Fluid Supply recirculating fluid slowly by using a funnel or a manual pump.

VQ5000

Note 3) Available only with F , L and T1 kits. Note 4) Specify the wiring specifications on the manifold specification sheet. (Except L kit) . . . . . . Minimum number of stations depends on the kit. (Refer to the table below.)

/

Left Left View Z 1 port side 2 port side 1 port side 2 port side 1 port side 2 port side Right Right View Z L W Note) When using a bracket whose direction is the same as that of the pilot valve, ensure that the installation surface does not get in the way of the pilot valve. T: Conduit terminal D/DO: DIN terminal W/V: M12 connector L Product specifications Series W W L W L N.C.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.