Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

Series SV

With external pilot specification (Pitch) P = 20.5 48.6 21.3 18 11 23.5 11.8 11.6 13.5 36.1 37.6 60.3 3 5 E 3 5 E 4 A 4 A 4 A 4 A 4 A 36 76.8 E 3 5 E 3 5 4 A 4 A 4 A 4 A 4 A 59.5 2 B 2 B 2 B 2 B 2 B 1 P 1 P C2 2 B 2 B 2 B 2 B 2 B 1 P C2 1 P x PE X PE C1 2-M12 C1 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing

1

U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" (Station n) (Station 1)--( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 A 4 A 4 A 4 A 4 A 4 Note 1) These figures show the SS5Y3-12F2-05D.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

) C6: 33.6 N7: 37.4 Note) Refer to page 176 for dimensions of connector types. 48 Body Ported 10-SY3000/5000/7000/9000 [ ]: AC Dimensions: Series 10-SY5000 2 position single Grommet (G), (H): 10-SY5120(-F2) G H C4, N3 C6, N7 C8, N9 Foot bracket 10-SY5120-F1 G H C4, N3 C6, N7 C8, N9 47 38 2 x M3 x 0.5, thread depth 4 (For mounting bracket) 22.6 12.7 16.7 16.6 29 22 + (For mounting) 2 x 3.2

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

4/5 Port Solenoid Valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

5 Port Solenoid Valve

2 x C8, C6, N7, (1(P), 3(R) port) C8: 8 one-touch fitting C6: 6 one-touch fitting N7: 1/4" one-touch fitting Dotted line indicates DIN rail mounting bracket (-D).

0.4

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Valve Single Unit

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Valve Single Unit

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

5 Port Solenoid Valve SY Series

13.1 28.5 [35.5] (15) 10 0.8 2 P EA EB 21.5 die-cast hole (For manifold gasket positioning) 19 M5 x 0.8 (P, EA, EB port) L plug connector (L): SY3220-L(-F ) 1 2 1 2 C4, N3 C6, N7 M plug connector (M): SY3220-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3220-W0(-F ) C4, N3 C6, N7 1 2 (Lead wire length) 108.6 [113] Approx. 300 28.5 [35.5] 13.1 33 15.5 M8 x 1 39.6 [46.6] Approx. 300 (Lead wire

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication