IDX-OM-W089

for OptionK 11 1 Safety instructions . 11 1 11 2 Specification . 11 1 Chapter 12 Specification for Option_L 12 1 Safety instructions . 12 1 12 2 Specification . 12 1 12 3 Installation . 12 2 12 4 Maintenance . 12 2 Chapter 13 Specification for Option_R 13 1 Safety instructions . 13 1 13 2 Specifications of the GFCI . 13 2 13 3 How to connect the power supply . 13 2 Chapter 14 Specification

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Servo Motor Controller (24 VDC)

Product Specifications .11 3.1 Basic specifications .11 3.2 Parts description .12 3.3 Outside dimension diagram .13 (1) Screw mount type (LECA6-).13 (2) DIN rail mount type (LECA6D-) .13 3.4 How to install .14 (1) How to install .14 (2) Ground wire connection .14 (3) Installation location.15 4.

Filter Regulator

-2.

energy saving effect

2 6 Circulating fluid outlet 1 Users equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 2 8 7 Water-cooled refrigeration Facility water inlet 1 Facility water equipment 7 2 Facility water outlet * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

CLQ

2".

Stainless Steel 316

Note 2) Figures shown when using FEP tubing H Straight Union: KQGH Applicable tubing O.D. (mm) Effective area Note 2) (mm2) Note 1) L M Weight (g) Model D 2 x applicable tubing 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 11 37 18 16 5.6 D D 13 38 18.5 22 13.1 M M 15 42.8 20.9 31 26.1 L 19 47 23 54 41.5 21 50.6 24.8 66 58.3 Note 1) D is maximum diameter.

Manifold Specifications

5 185.5 175 154 16 6 198 187.5 173 12.5 7 223 212.5 192 15.5 8 235.5 225 211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12 2 123 112.5 97 13 Stations L1 L2 L3 L4 C6C C8C VV5Z5-45FU DStation B(2 to 10 stations) Separation lever (Push type) C6C C8C VV5Z5-45FUStation C6C C8C VV5Z5-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) (mm) 2 123 112.5 97 13 3 148 137.5 116 16 4 160.5 150 135

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure

Compact Cylinder with Lock Series CLQ

(2 color indicator) IC circuit 5V, 12V 3 wire (PNP) F9PWV F9PW F7PW F9BWV F9BW J79W F7BWV Grommet 12V 2 wire Water resistant (2 color indicator) With timer With diagnostic output (2 color indicator) Latch type with diagnostic output (2 color indicator) Lead wire length symbols 0.5m .

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

JXCx-OMX0009

Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robotic type cable A A-5 Black 6 B B-6 S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 2 1 A6 B6 15 (3) 16 L (11) (30.7) [2] Actuator cable [8 20m] LE-CP(1) (2) Signal name Terminal No. Cable color Terminal No.

HRX-OM-T002

2-2 Names of the parts (This drawing shows HRS090-A-20.)

JXCx-OMT0061CN

d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

Brake mechanism added

Bore size (mm) Nut Width across flats Socket Width across flats Socket Mounting bracket nut Unit holding tie-rod JIS B 4636 2 point angle socket 10 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 With connector: Within 20.5 mm 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 13 How to Manually Disengage the Lock and Change from the Unlocked to the Locked State Manual unlocking 1.

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

New

460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.