Style: H (Single Axis Type), Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 1100, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2P [LECP2, Programless Type (w/Stroke Study), PNP], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 1100, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2P [LECP2, Programless Type (w/Stroke Study), PNP], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: L (Symmetric, Top Mounting), Stroke: 1100, Motor Option: B (w/Lock)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: L (Symmetric, Top Mounting), Stroke: 1100, Motor Option: B (w/Lock), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C91 (EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 8 (DIN Rail Mounting)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 1100, Motor Option: B (w/Lock)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 1100, Motor Option: B (w/Lock), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C91 (EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 8 (DIN Rail Mounting)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 1100

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 1100

Style: H (Single Axis Type), Size: 32, Motor Mounting Position: LU (Symmetric, Bottom Mounting), Stroke: 1100, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C91 (EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 8 (DIN Rail Mounting)

Model: 11 (800 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 2 (Voltage Style 0~5VDC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 1 [1/8 (1100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Model: 11 (800 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 2 [1/4 (1100, 2100, 3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: T (High-pressure Pump)

High-precision Digital Pressure Switch ( compatible)

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -68No.PS-OMV0004-H Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

Digital Pressure Switch ( compatible)

. (-50 ~ 50) 0.1% increments 0x0424 (1060) 0 R/W N S16 0x0 (0) 0: Std 1: dUAL (2 value display) 2: o1Lv (OUT1 level bar) 3: o2Lv (OUT2 level bar) 4: LinE (Line name) 5: oFF (No display) Setting of lower level screen 0x044C (1100) 0 R/W Y U8 0 During Std setting Selection of display item Y U8 0 Refer to Table "selection of display items during std setting". 0x044D (1101) 0 R/W Lower level

High-precision Digital Pressure Switch

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -72No.PS-OMV0009-E Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

24 VDC) Max. number of step data 64 points Power supply voltage 24 VDC 12 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100

25

silicon 100 m/s2 Ambient and fluid temperature Ambient humidity Material Impact resistance Standards/Directive CE (EMC Directive: 2004/108/EC) Note) When the air purge is performed between a charged object and an ionizer at a distance of 300 mm Number of emitter cartridges/Bar weight 340 5 590 740 860 Bar length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100

Compact 5-Port Solenoid Valve

connector: IP40 IP65 IP67 I/O unit: partially IP40 Unit: g w Wiring Terminal block box Lead wire Serial wiring T type TC type L type (0.6 m) L type (1.5 m) L type (3 m) S6m type (EX600)*4 SAm type (EX245)*4 Sm type (EX250)*4 Sm type (EX260) S3m type (EX120) 680 471 404 514 698 829 520 448 367 689 480 413 523 707 838 529 457 367 709 500 433 543 727 858 935 549 477 391 914 705 638 748 932 1063 1100

KT10

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Industrial Filters

30 36 28 42 04 FGDTA 110 1000 13 32 36 46 32 57 06 FGDFA FGDCB 200 600 17 25 26 28 26 30 03 FGDEB 200 840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100