Environment

@6 @7 Cable is shipped together. @1 @0 @3 @4 @5 !

SMC Pneumatic Clean Series

4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.

2–4

6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

LEC-OM038xx

But, it is invalid when Stop is 1 (ON) or CN2SW is ON. (4) Stop All communications to the connected motor controller (LEC) are stopped when 0 (OFF) is changed to 1 (ON). Communication restart by chancing to 0 (OFF) from 1 (ON). (5) Setting numerical data(Valid only in direct setting mode) ON (1) appears in ID bit if numerical data can be read.

IDX-OM-W028

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly. 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Chapter 6.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Series IDG

to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) (23 to 131F) Note 1) 5 to 50C 5 to 55C (23 to 131F) (23 to 131F) Note 1) 5 to 50 C 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 15C (-5F) 56 (2.0) 111 (3.9) 222 (7.8) 335 (11.8) 560 (19.8) 830 (29.3) 1110 (39.2) 665 (23.5) 28 (1.0) Outlet air flow rate l

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

SMC

The brown lead wire or terminal No.1 is (+), and the blue lead wire or terminal No.2 is (). [In the case of model D-97, the side without indicator is (+) and the blue line side is ().] 1) If connections are reversed, a switch will operate, however, the light emitting diode will not light up.

IIIIIIIIII

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Large Size Vacuum Module: Series ZR

ZR1-F-D Filter switch unit for replacement 12 Refer to Table (5) on page 944-1. Pilot valve assembly Valve body assembly 6 7 Refer to Table (1) on page 944-1. Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

PFxx-OMX0002

The response time indicates when the set value is 90% in relation to the step input. Digital filter F This means "full span" or "full scale", and indicates varied analogue output range at rated value. For example, when analogue output is 1 to 5 V, F.S. = 5 [V] 1 [V] = 4 [V]. (Reference: 1%F.S. = 4 [V] 1% = 0.04 [V]) F.S.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

Slider Type Ball Screw Drive/11-LEFS Series

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

Electromagnetic Digital Flow Switch

(Interval of 2 or 5 minutes can be selected.) If the 5 minutes interval is selected, the life of the memory element (electronic parts) is limited to 1 million times. (If energized for 24 hours, life is calculated as 5 minutes x 1 million = 5 million minutes = about 9.5 years.)

Modular/F.R.L. Units Series AC

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.

High Vacuum Angle Valve

5 XLAV16-90-2 (XLAV63-90-1 only for XLFV-50-2) XLAV63-90-1 * The -mm at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications.