CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

70pvpump

(A) 2 4.5(0.25) 9.0(0.5) Refer to Best Pneumatics Vol. 4 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Specifications Mist separator Series AM Model Compressed air 1.0 MPa 0.05 MPa 1.5 MPa 5 to 60C 0.3 m (95% filtered particle diameter) Fluid Max.operating pressure Model AM150 AM250 Rated flow l/min (ANR) 300 750 Min. operating pressure (1) Proof pressure Port

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

Sine Rodless Cylinder Series REBR Direct Mount Type

6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Card Motor

An Table 1 (Vertical) Mounting angle [] (Horizontal) From Table 1, A1 = 32.5 M = W/1000 9.8 (Ln + An)/1000 Pitch moment Table 3 Mmax = M/Mmax Mp = 200/1000 x 9.8 (10 + 32.5)/1000 = 0.044 From Table 3, Mpmax = 0.3 p = 0.044/0.3 = 0.15 p +y +r 1 Roll moment Mr = 200/1000 x 9.8 x 35/1000 = 0.069 From Table 3, Mrmax = 0.2 r = 0.069/0.2 = 0.35 n = 0.15 + 0.35 = 0.5 1, thus, the selected model

e

A Cable length Standard Stroke M L Z 1 m 3 m 5 m Nominal size Standard stroke (mm) Made to Order Long stroke (-XB11) Stroke range (mm) The remote control type can be selected by adding the above symbols. 16, 25 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 601 to 1000 Strokes are manufacturable in increments of 1 mm, up to 1000 strokes.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

GR-S-010(10g) GR-S-020(20g) 6 - R/L side parallel type LEKFS16 18 26 25 Component Parts No. Description Material Note No.

Series IDG

dew point will increase by 1C (34F) or less for tubing lengths of 5m (16ft) or less. 3 4 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 15C (5F) Specifications How to Order 1l/min = 0.035SCFM IDG 10 H 03 Optional specifications Flow rate by size Symbol Contents Size Outlet air flow rate Purge air flow rate l/min (ANR) Size 5 10 20 30 3 50 60 75 100 50/6 3 25/3 Nil P R

MXW

R: Right (OUT side) L: Left (IN side) Made to Order Specifications (For details, refer to pages 1955 to 2021.) MXP L R MXY Theoretical Output Dual rod cylinder produces double the thrust of standard cylinder.

Plate Cylinder

1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

Wireless System

Forced output mode OFF Wireless master unit is not registered. 16 EX600-W Series Accessories (Optional Parts) y Communication cable with connector u Power supply cable with connector r Seal cap (M8) t Marker w Valve plate r Seal cap (M12) i Power supply cable (7/8 inch connector) e Reinforcing brace (for direct mounting) e Reinforcing brace (for DIN rail mounting) q End plate bracket i Power

Series 12-REA Sine rodless cylinder

L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

Digital Flow Switch (Remote type sensor unit)

Bracket cannot be mounted onto the 250 L/min type. Replacement part Element Part number Remarks Vinyl chloride piping tube (25 A) ZS-40-U25 25 A Vinyl chloride piping tube 1 pc.

Series LC7R Dedicated Regenerative Absorption Unit

unit LC7R-K1A Note) Select 6mA or less for resistor R after confirming the input capacity of the control equipment.

D. P. Lube ALD600/900 Series

3 55.5 344 487 145 90 150 500 20 430 470 1 1 1 2 175 87.5 30 62.5 4 1 639 639 639 416.5 48 250 125 33.2 33.2 250 250 125 639 230 120 227 2 1 1055 ALD600/900 Series Related Products: Strainer At the terminal of an air pressure line in which a D.P.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Equipment L or R shows the left or right of the filter IN when viewed from front. 100 200 50 l /min (ANR) 200 l /min (ANR) Port size Thread type B (ZFA100) 1 8 1 4 02 01 ZFA200 B (ZFA200) Nil T Rc NPTF F G How to Order Manifold JIS Symbol Indicate both the symbols for air suction filter and bracket for manifold.

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .