S

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Digital Flow Switch (Integrated display type)

of analogue voltage output Output type "L3" only 2100 0x0834 0 R/W Analogue voltage output U8 0 Y 0: 1 to 5 V 1: 0 to 10 V Analogue Free Span Function ON/OFF 1 R/W Analogue free span U8 0 Y 0: oFF 1: on 2110 0x083E 2 R/W Analogue free span Set value S16 4000 Y Setting range 400 to 4200 Set value of Analogue Free Span Function ON 0: oFF 1: 2.0min 2: 5.0min 2200 0x0898 0 R/W Accumulated-value

Table of Contents

0 IS1000 No. q w e r t y u i o !

MXW Series Long Stroke Slide Table

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

LEC-OM02904

U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

HRX-OM-I051

gauge Facility water outlet (Rc1/2 w/ plug ) Level Facility water circuit switch Facility water inlet (Rc1/2 w/ plug ) Press.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

MXW

Load factor an Va Item Note CX W Examine W.

Air Slide Table Series MXW

W = 1 [kg] (Except arm section mass) L3 = 50 [mm] L2 = 50 [mm] 1 = W/Wmax MXF Item Load factor n Note Va MXW W Examine W.

Table of Contents

DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (7.5 mA), Holding 0.83 VA (7.5 mA) 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 3 position closed center 220 VAC Inrush 1.1 VA (5 mA),

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

CS1

212 475 23 M30 X 1.5 175 369 115 190 384 30 33 80 76 70 96 60 20 30 65 48 49 to 2000 Long stroke With auto switch/125 to 200 only (mm) W/ rod boot (mm) Style Bore (mm) W/o rod boot W/o rod boot W/ rod boot Stroke range (mm) Style Bore (mm) Long stroke range (mm) 125 140 160 180 200 250 300 S RY M2 RT M1 ZZ1 ZZ ZZ1 ZZ 125 140 160 180 200 to 1400 98 1401 to 1600 164 36 22 22 253 261 230 238

MTS

Vertical Mounting L MX W MTS Mounting orientation MY W CY L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum speed (mm/s) 100 All strokes 200 300 400 600 800 500 Stroke (mm) CX (1) (2) (3) 8 Selection graph D(4) (5) (6) (7) 12 to 40 -X Horizontal

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Vertical Mounting L W Mounting orientation W L Maximum speed (mm/s) Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 800 All strokes Stroke (mm) (1) (2) (3) 8 Selection graph (4) (5) (6) (7) 12 to 40 Horizontal Mounting W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal.