CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

1 r #6 @3 #9 @7 y u t !5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Hygienic Design Cylinder Series HY

6 y u q !5 !8 i e !7 !4 t !9 !0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

0.55

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B Conduit terminal with indicator light (TL) Light Light position Max. 11 Applicable cable 6 to 12 [ ]: With indicator light (TL) 1500 Made to Order: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 CE-compliant Body size CE-compliant Nil 4 6 8 1 2 Q Electrical entry: D/DO only

ARM10/11

Accessory 6.

ARM10/11

Accessory 6.

MVGQ

Refer to Fig. (6) (for the meter-out mode). RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6) The speed controller that is located on the side of the selector plates () direction controls the speed.

Plug-in/Plug Lead: Single Unit

39 Series VQ5000 Construction Plug-in Unit Metal seal Rubber seal type e e q w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Slider Type Ball Screw Drive/11-LEFS Series

2 Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V A Servo motor (24 VDC) V V LECA6 r Lead [mm] Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8 10

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

AC Servo Motor Driver (Pulse input type/Positioning type ）

PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

Fieldbus system PROFINET compatible SI Unit

to 134 byte 6 to 134 byte (4 ports) (Max.32byte per port) (Max.32byte per port) IO-Link master Class B EX600-LBB1 6 to 134 byte 6 to 134 byte (4 ports) (Max.32byte per port) (Max.32byte per port) -67No.EX-OMY0027 Details of I/O map of the IO-Link master unit I/O map of standard IO and PQI are described below. ( Identical to EX600-LAB1 and EX600-LBB1) Standard IO Input Output Bit 7 Bit Bit

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM B 6 6 6 6 6 C 22 27 32 41 41 Part no. Part no. Part no.

RB/RBL/RBQ

6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.