Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 400, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Air Compressor Size(kW): 3.7, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Thread type Type Rc NPT G Symbol Nil N F Accessory (2) Port size Symbol Nil H Description With set nut ARG40 Body size Port size Symbol 20 30 40 01 02 03 04 1/8 1/4 Accessory (1) 3/8 1/2 Symbol Nil B Description With bracket (With nuts) Mounting Angle of Pressure Gauge JIS Symbol G4 G3 G2 G1 Symbol ARG20 to 40 270 180 90 0 Mounting angle MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view

Rotary Cylinder Series MRQ Size: 32, 40 1

Application Example Piping port M5 x 0.8 Releasing a workpiece Changing direction Piping port Rc 1/8 Connecting ports are provided IN two positions as standard specifications. 11-10-1 2 Technical Data 1: How to Set Rotation Time Allowable Kinetic Energy Even if the torque that is required by the load in the rotation movement is small, the internal parts could become damaged depending on the

MGQ

Side mounting Bottom mounting (Except 12, 16, 20, 25) Terminal Band 8-20-1 2 Compact Guide Cylinder Series MGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGQ M 25 30 Y7BW Thread type Rc G Nil E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bearing type

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: C (20)

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: Power supply cable included (10 m) / with bracket, I/O specifications: PNP output, Connector options: -, Model: -, Bar length(mm):

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 20, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or

PFxx-OMP0001CN

kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type