CE

CC RB J D-X 20Data 10-12-11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

ZSE1/ISE1

) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

ZSE3/ISE3

Operate it away from direct sunlight. 16-4-6 7 LCD Readout Digital Pressure Switch Series ZSE3/ISE3 Dimensions/Switch Only Grommet type 30 SE3I Z 01 T1 20.5 ZSE ISE RESET button DOWN button PSE SET button UP button Z I SE3 Lead wire length 600 40.5 8.5 PS 3.5 (3000) Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

VQ5000

0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

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:"F ooo Series SV2000. 3000. 4000 Option Nole) Nole that a part nurnber for Series SVr 000 wth presslre gauge d flers depending o.lhe pos tion of lhe stat on {odd no or even no ) on whch the man fold s mo!nted 1{) prevenl lhe press!

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nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !

3

PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

4000 0 1000 2000 3000 (mm) (mm) 4000 Support spacing (l) Support spacing (l) 8-12-22 23 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Proper Auto Switch Mounting Position (Detection at stroke end) Note) The operating range is a guide including hysteresis, but is not guaranteed.

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Trimmer Auto Switch

. *3 Not applicable to the CQ2-Z series. 3 Trimmer Auto Switch Series D-M9K/D-7K/D-RK Dimensions Sensor Unit D-M9K D-Y7K 2.5 Mounting thread M2.5 x 12L M2.5 x 4L Slotted set screw 3.5 3.5 Hexagon socket head cap screw 6.2 5 2 33 3000 2 26 3000 (2.5) 5 10.6 0.4 3.95 8.8 3.1 10.8 5.8 12.5 Most sensitive position 6 Most sensitive position D-F7K 8 3.2 3.5 4 7 15 3000 23 4.6 11 1 6.2 3.2 8.5 Most

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16C/-17C SE1-01-16/-17 I Z I Z Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

IS ISG ZSM 769 Series ZSE3/ISE3 Dimensions/Switch Only Grommet type 30 SE3I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 3.5 (3000) 40.5 8.5 01: R 1/8 T1: NPTF 1/8 2 x 3.5 Mounting hole 13 M5 x 0.8 Connector type 30 SE3C I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 3.5 (3000) 10 39 8.5 01: R 1/8 T1: NPTF 1/8 2 x 3.5 Mounting

Thermo-con

3000 Facility water: 68F (20C) Facility water: 50F (10C) 2500 2500 Facility water: 50F (10C) Cooling capacity (W) Cooling capacity (W) Facility water: 68F (20C) 2000 2000 Facility water: 95F (35C) 1500 1500 Facility water: 95F (35C) 1000 1000 500 500 Facility water flow rate: 2.6 gpm (10 L/min) Facility water flow rate: 2.6 gpm (10 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70

“

Flow Rate Characteristics Relief Characteristics IR3220-04-A Supply pressure: 0.7 MPa IR3220-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

90

For double For single Red White Red Black Black Width across flats Nil 6 10 20 30 300 mm 600 mm 1000 mm 2000 mm 3000 mm Width across flats V port size 6 8, 5/16" 1/4" 4 6 4.76 Note) When ordering, put the connector assembly part number to the product part number without connector. 28 Series ZK2 Specific Product Precautions 3 Be sure to read the below before handling.

E/P Pressure Regulator

E/P Pressure Regulator Manufacturing Pneumatics Worldwide Electro-Pneumatic Regulator Compliant Electronic Vacuum Regulator How to Order ITV 2030 SEN DUQ00833 2 X26 Port Size 1 2 3 4 1/8 (1000) 1/4 (1000, 2000) * 3/8 (2000, 3000) * 1/2 (3000) Body Size 1010 1030 1050 2010 2030 2050 2090 3010 3030 3050 * Note: 2090 available with 1/4 port only.

AP3100

Specifications Operating Parameters Gas AP3100 AP3157 AP3102 AP3150 AP3125 Select compatible materials of construction for the gas Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Operating pressure 4500 psig (31 MPa) 10 psig (69 MPa) -40 to 65 C (No freezing) 2) Proof pressure Burst pressure Ambient and operating

P

MPa Nil Without bracket B Flat bracket C L-bracket Port size Power supply voltage 0 24 VDC 1 1/8 (1000 type) 2 1/4 (1000, 2000, 3000 type) 3 3/8 (2000, 3000 type) 4 1/2 (3000 type) Communication model IO IO-Link Thread type Nil Rc N NPT T NPTF F G Refer to the Web Catalog for brackets and cables.