AC Servo Motor Driver (Pulse input type/Positioning type)

) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration time constants (msec) PE07 100 600 300 150 600 300 150 1000 500 250

Fieldbus system (DeviceNet compliant)

Product type: 12 Product code: 100 Device information Duplicate MAC ID Check Message Group2 Only Unconnected Explicit Message Explicit Message Poll/I/O Message Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) Communication speed 125 kbps 250 kbps 500 kbps Thick cable 500 m or less 250 m or less 100 m or less Max. length of Network

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

CG5-S

Relationship of liquid entry and sliding distance X Amount of liquid entry (g) 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250

CC

Data A Volume of cylinder/Capacity of converter 180 160 140 125 100 300 250 800 700 600 How to Select 200 10,000 8,000 6,000 5,000 4,000 3,000 500 400 qSelect the bore size of air-hydro cylinder 80 First of all, select a bore size from data .

Series IDG

Standard performance conditions Standard performance Inlet air pressure 0.3 to 0.85MPa (43.5 to 123psi) 0.3 to 1.0MPa (43.5 to 145psi) 5 to 55C (23 to 131F) 5 to 50C (23 to 122F) 5 to 55C (23 to 131F) Inlet air temperature Note 1) Ambient temperature IDG10 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point 20C (-4F) IDG30 JIS symbol 12.5 (0.44) 625 (22.07) 62 (2.19) 125 (4.14) 250

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 16 stations) Dimensions 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

Table of Contents

with check valve 300 250 Insertion force N KKA4 without check valve 200 KKA4 with check valve 150 100 KKA3 without check valve 50 KKA3 with check valve 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Charging pressure MPa 15-2-97 26 26 S Couplers Specific Product Precautions 3 Be sure to read before handling.

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

Plate Cylinder

Optimum operating position D-M9A(V) D-M9W(V) Series Variations Standard stroke (mm) Rod end configuration Action Type Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Single rod 25 32 Double acting 40 Double rod 50 Male thread, Female thread 63 Spring return, Spring extend 25 32 Single acting 40 50 63 Features 1 Series MU Rod End Allowable Load Y axis X axis In case of a plate

CJ2X/CUX/CQSX/CQ2X/CM2X

to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature REC Cushion Rubber bumper CX Piping 20 to 32: Rc 1/8, 40: Rc 1/4 Screw-in type Standard Stroke Lubrication Not required (Non-lube) CY Thread tolerance JIS Class 2 +1.4 0 Stroke length tolerance Bore size (mm) Standard stroke (mm) Note) MQQ M Piston Speed 20 RHC 25 25, 50, 75, 100, 125, 150 200, 250

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

Air Catch Sensor

Station L1 L2 2 110 3 145 36 4 180 71 5 215 106 6 250 141 Unit Manifold With DIN rail Deflection level indicator Terminal block box 35 40 L1 Deflection level indicator 75 40 Terminal block box Rc1/8 SUP. 25 DIN rail center 70 (94.4) 90 25 (94.4) SUP 70 4.5 90 40 (4.5) 30 4.5 Adjusting knob Gauge Electrical entry Applicable O.D. 6.5 to 8.5 12 L2 L3 Gauge 105 Electrical entry Applicable O.D