Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

LEC LEC S T T-branch type communication plug connector*2 *1 When Without controller is selected for controller types, I/O cable cannot be selected. Refer to page 589 (For LECP2), page 582 (For LECP1) or page 568 (For LECP6) if I/O cable is required. *2 For the LECPMJ, only Nil, S and T are selectable since I/O cable is not included.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Speed Controller: Standard Type Series AS In-line Type

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Peltier-type Chiller Thermo-con/ Compact Type

Thermo-con/ Compact Type Air-cooled Compact 130 mm x 210 mm x 150 mm Height Width Depth Low-noise design (at low load): 37 dB 130 mm 150 mm Display/Operation panel 210 mm Circulating fluid level gauge Dustproof filter Replaceable Cooling capacity: 220 W Superior temperature control Temperature stability: 0.1C Now only takes about 41 seconds to lower the temperature by 10C 86% reduction (41 s

Micro-Mist Separator with Prefilter Series AMH

X15 AMHSCJJ Body size* * Thread Semi-standard* specification Port size* X6 A:~S~J .ize*Thread1 Semi-standard * specification * Port size (Not available with element * Accessories service indicator "T".) Accessories* Dimensions Dimensions ~.~ CD ~~

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Cylinder extension speed: 100 mm/s Meter-out needle fully open AS-FM AS-D 100 mm/s AS-T Return speed ASP ASN AQ (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. ASV AK VCHC ASR ASQ Note) Use AS-FG series with -X214 for the throttle valve. 707

CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Auto switches are shipped together, (but not assembled). 1 Series MXQR Specifications 6 8 12 16 20 25 Bore size (mm) Piping port size M5 x 0.8 Rc1/8, NPT1/8, G1/8 Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature 50 to 500 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) (Adjuster option/Shock absorber: 300

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

AS ASP ASN AQ ASV How to Order AK D 01 S AS 2 0 0 2 ASS ASR ASF Type adjustable by flat head screwdriver Body size 1 2 3 4 JIS Symbol M5 standard 1/8,1/4 standard 3/8 standard 1/2 standard With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

AMPSeries

speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l/min, the upstream pressure is 0.037MPa. 1m = 3.28 ft. 6 Safety Instructions Series AMP These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Long stroke type 50, 63 Low-speed cylinder (7 to 50mm/s) CY3B CY3R CY3B CY3R With magnetic shielding plate 3000 Bore size 63 Bore size 63 With floating joint 2500 For clean specifications, refer to Pneumatic Clean Series catalog (CAT.E02-23).

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

(mm) Piston speed (mm/s) Lock type 100 300 500 1000 0.3 0.6 1.0 2.0 Spring locking Condition: Lateral, Supply pressure P = 73 psi Load weight Upper limit of allowed value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements 4

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Number of auto switches Bore size (mm) Nil S n 2 pcs. 1 pc. n pcs. 10 15 25 10 15 25 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Bag Filter FGF Series

RoHS Bag Filter FGF Series FGF1 FGF3 FGF5 (Made to Order) FGD How to Order FGE Pressure gauge Pressure gauge With pressure gauge (1 MPa: Brass for wetted parts) Without pressure gauge (with plug) 3 005 One element included FGF S A E B Symbol G 1 20 005 FGG G FGA Nil Three, five elements included (Made to Order) FGF S A 40 E F Note that the differential pressure must be controlled strictly

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Unit psig/bar MPa Code B V C V No code MPA 4P 4PN

Exhaust Cleaner for Clean Rooms AMP Series

speed meter 0.03 AMP320 AMP220 0.02 0.01 0 200 400 600 800 1000 1200 Exhaust flow rate l/min (ANR) 1MPa = 145 psi 1 l/min = 0.035 SCFM Viewing the graph: When using AMP320 at a flow rate of 500l/min, the upstream pressure is 0.037MPa. 1m = 3.28 ft. 6 Safety Instructions Series AMP These safety instructions are intended to prevent a hazardous situation and/or equipment damage.