Vacuum Module Series ZX

B Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Unit no.

ZP

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Horizontal lifting Vertical lifting Basically ( avoid this use. ) ZL Theoretical Lifting Force ZY The theoretical lifting force (not including the safety factor) is

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

CRB2/CRBU2/CRB1

CRB2BW, CRBU2W: Sizes 10 to 40 CRB1BW: Sizes 50 to 100 10-3 10-1 10-4 Inertial moment (kgm2) Inertial moment (kgm2) CRB2BW, CRBU2W10-D CRB2BW, CRBU2W15-S CRB2BW, CRBU2W15-D CRB2BW, CRBU2W20-S CRB2BW, CRBU2W20-D CRB2BW30-S, D CRB2BW40-S, D CRB1BW100-D CRB1BW50-S CRB1BW50-D CRB1BW63-S CRB1BW63-D CRB1BW80-S CRB1BW80-D CRB1BW100-S 10-2 10-5 CRB2BW, CRBU2W10-S 10-6 10-3 10-7 10-8 10-4 0.03 0.1

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRB2BWU10-D CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 Refer to the drawing.

Table of Contents

CRB2BWU10-D CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 Refer to the drawing.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRB2BWU10-D CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 Refer to the drawing.

ZX

Without connector None Nil G H Nil Grommet type Lead wire length 0.3 m (Applicable to DC only) Lead wire length 0.6 m (Applicable to DC only) Air operated Z With light/surge voltage suppressor S With surge voltage suppressor In the case of AC, S is not available. Note) In the case of K1 or J1 (combination of supply and release valves), M type plug connector can not be used.

CLK1

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

Stroke Reading Cylinder and Counter

175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Suction Guard (Produced upon receipt of order) FHG Series

S-type block companion flange L-type block female threaded companion flange S-type block female threaded companion flange Differential pressure indication switch d Differential pressure indication switch S-type block Differential pressure indicator E (Rc) S-type block Differential pressure indication switch Y (75) (50) AE Differential pressure indicator E (Rc) K Differential pressure indicator

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mbe' ol scteno ds ror m red s ni e a rd d.lLhlevrrn! The naxrmln nJmbe I or sr.t o.s s delermried by lr toLa i!nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

Mechanically Jointed Rodless Cylinders

Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Refer to page 27 for the MY3M.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Clamp Cylinder with Lock Series CLK1

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22