MK

13.5 0.15 7.5 20 36 46.8 36 48 24.5 75.5 62.5 31 4 MK2B25 16 8 23 40 52 53.8 40 27.5 78.5 65.5 32 5 Note 1) Above figure is for D-A73, A80 Note 2) Dimensions E and F are 7mm longer for the auto switches with connector (D-A7lC, A80C, J79C).

VQ4000

Nil W 2-5-5 Base Mounted 6 Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Courtesy of Steven Engineering

Rotary Table/Rack & Pinion Style Series MSQ

Nil S n Copper, fluorine and silicon-free + Low particle generation 22 Vacuum suction type Reed switch Auto switch A90 Solid state switch M9B, M9N A With adjustment bolt R With internal shock absorber Auto switch specifications Load voltage Load current range Indicator light Applicable load Type Auto switch model 24 VAC or less, 48 VAC or less, 100 VAC or less 24 VDC or less, 48 VDC or less

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

WB WA WA WB KK D KK B D B R E 2 x 4 x RT VD L9 E R VD L12 L2 BG G WH A H G L12 L2 BG H + Stroke A WH + Stroke ZY + 2 x Stroke L8 + Stroke With rod boot at one end e d l h + L8 + H + 2 x Stroke h f Bore size [mm] Stroke range [mm] A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY E R L2 L9 H SL 32 Up to 1000 22 30 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 26 190 47 32.5 15 4 48

PSE200

When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely. To connect the connector to the multi-channel pressure sensor, push the connector with its A portion facing toward you into the socket until it clicks as shown below.

VXR21/22/23

48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

VQ4000

W Dust proof Dust tight, Jet proof V V 1.11-5 Series VQ4000 Plug-in Conduit terminal 0 1 2 position single: VQ410 l 23.5 23.5 50 158 50 90 108 158 Indicator light 11 (A port) 11 (B port) (12.5) 5 3 (12.5) 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 25.6 Mounting hole 14 5 1 3 12 30 45 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) Manual override Bottom piping SMC (A, B port

PSE530/200

When using 48 conversion adapter 48 conversion adapter (ZS-26-D) B A 4 3 2 1 4 3 2 1 4 3 2 1 Verify from the top side of A that the lead wires are inserted completely. To connect the connector to the multi-channel pressure sensor, push the connector with its A portion facing toward you into the socket until it clicks as shown below.

3 Port Air Operated Valve Series SYJA300

override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

When using 48 conversion adapter 48 conversion adapter (ZS-26-D) (PSE300T) Figure (b) Figure (a) 1. Please affix the main body by hooking the claws of the lower part over the DIN rail and pressing in the direction of the arrows as shown in Figure (a).

2/3 Port Valve for Various

48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

Air Cylinder

Lead wire Oilproof vinyl heavy insulation cable, 4, 0.3mm2, 2 cores (Brown, Blue), 3m (Standard) Refer to common specifications and lead wire length on page 48.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Center/Pressure Center Grommet (G): VQZ3 2 (R)-G1-C6, C8, C10 0 1 3 4 5 130.7 Approx. 300 (Lead wire length) 58.6 49.9 36.4 24.4 A 2 4 13 4 B Manual override One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 18 38 6, 1/4" 8, 5/16" 10, 3/8" M5 x 0.8 (External pilot port) 2 x 3.4 (For manifold mounting) (5.5) 50.6 + 32 24.7 16.6 0 1 VQZ3 2 (R)-G1-02 3 4 5 3 48

17

50 6.5 13 9 13 83 84 86 88 96 104 130 130 121 122 124 124 44 44 60 70 171 172 174 174 110 118 146 158 42 50 66 80 78 86 110 124 4 4 5 5 98 106 130 142 4.5 4.5 6 6 63 72 92 110 3 3 4 4 24 24 24 28 6 6 8 8 48 48 48 52 16 16 20 20 124 124 124 128 21 22 24 24 200 200 200 200 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions (mm

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5

Compact Cylinder with Lock Series CLQ

52 42 46 62 66 9.2 10.7 45.2 49.2 20 25 L1 Rod end nut Front flange type: CLQF/CDLQF FV S Front flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A + Stroke L G B + Stroke 8 2-6.6 FZ FX B 71 78.5 19.5 22.5 61 68.5 A A B 29.5 32.5 5 to 50 5 to 50 20 25 Bore size (mm) FV G FX FZ L L1 S L1 Rod end nut 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 20 25

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Refer to the dimensions on page 562 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5