3

(Clamp part) Note 1) 1.4 1.2 0.9 0.7 Note 1) Refer to Rotary Angle figure.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Seal type Nil E With Without light, with surge voltage suppressor Metal seal Rubber seal 0 1 Coil voltage 1 2 3 Stations Function D side U side 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) R Note 2) Note 1) Applicable to DC specifications.

LEC-OM02704CN

*CDV 1 116384 (1) 1/9 CMX/CDV 9 (2) CDVSTN 32767 (3) CMXCDV 10 (A37) PA06PA07116384 nm PA06 PA07 15 74 15 (a) 1 5020 PA0650 PA0720 50 20 (b) 2 50201/9 50 20 50 450 1 9 20 PA06450 PA0720 20 1/9 15 75 15 (7) PA08 ATU 0001h PA09 RSP 12 132 8.2 (a) (PA08) PA08 0 0 0 PB0 8 PB0 9 PB 1 0 0 PB0 6 PB0 7 PB0 8 PB0 9 PB 10 PB0 6 1 1 PB0 7 PB0 8 PB0 9 PB 1 0 2 2 3 .

Short Stroke Electric Actuator Series LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 50 50 2.1 1.1 0.3 0.1 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 0.6 0.2 0.1 1.1 0.6 0.2 0.1 200 200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

Air-hydro Unit

25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24

Refrigerated Air Dryer

45 50 45 50 55 60 65 70 75 80 5 10 15 1.73 1.15 0.59 0.62 1.3 1.07 1 0.72 1 1 1.68 0.81 0.82 0.95 0.88 0.68 0.9 0.95 0.57 0.86 1 0.82 1.06 0.79 1.11 1.16 Data Ambient temperature Data Air flow capacity Series IDF Series IDU Series IDF Correction factor Correction factor Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E Ambient temperature (C) Ambient temperature (C) 25 30 32 35 40 25 30

CC

1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

MK

50 to 200 mm/s Piston speed Non-rotating accuracy 1.2 0.9 0.7 ML1C Note 1) Max. bending moment applied to the piston rod side.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Coil voltage 1 2 3 4 5 6 9 Function 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others H Note 1) Standard type (1.0W) High pressure type (1.5W) Low wattage type (0.5W) External pilot Y Note 1) R Note 1) Aplicable to DC specification Note 2) When specifying more than one option, combine symbols in alphabetical order. 14 How To Order Series VQZ Manifold Connector

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

VQ5000

When entry of part numbers becomes complicated, indicate in the manifold specification sheet. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) Seal 1 2 3 Stations (2) D side U side Metal seal Rubber seal 0 1 Note 1) Applicable to DC specifications.

CXS

8 NPT 1/8 G 1/8 P Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

CXS

= 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM CXSL 0.1 10 20 30 40 50

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange type 1. Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.