Digital Flow Switch ( compatible)

Order of function settings Order F number Items Notes 1 F 0 Switching function of reference condition, unit selection function, switch output specifications All models 2 F 1 Setting of OUT1 All models 3 F 2 Setting of OUT2 SW2 output type 4 F 3 Digital filter setting All models 5 F10 Sub screen setting All models 6 F14 Zero cut-off setting All models 7 F20 Setting of external input Model

RHC

16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed energy since cushioning ability may in some cases exceed the allowable cushioning ability if the cylinder is used under high speeds and large loads. 0

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

%silltr

4 = 100 ff, f 1 = 40"F, T2 = AO"F, VZ = ? We have to use th absolute tompratures in H (Rankine), thus 1oo v2 vz= 19!Ij!2Z=1ssrt" 4997 539?

C95Series

FX f~ Rod Ilange / (F) S1r,*-~ llin!1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

VQ5000

Maximum stations are 12.

LEY-OM007

DIN * * I/O [m] 1.5 3 5 D D 25 16 25 16 32 32 LECP6 LECP1 LECPA 6 N DC24V PNP NPN PNP NPN PNP NPN LECP6/LECA6 6 P ( ) DC24V 1 * 1N * LECA6 LECP1 ( ) 1 * 1P * [mm] A * AN * LECPA ( ) A* AP * ( ) LEYG 32 LEYG 25 LEYG16 LEYG16 LEYG 25 LEYG 32 [mm] 5 10 * 8 16 6 12 30 [m] 4 3 2.5 * * * * C * B * A * 8 * 20 15 10 8 500 1 3 5 1.5 3 1 5 * 2 1 2 F F 1 2 2532 * 1630

Multi-channel Digital Sensor Monitor

0 Differential pressure check mode, pressure range, display unit 31 F 1 Setting of OUT1 37 F 2 Setting of OUT2 40 F 3 Digital filter setting 42 F 4 Auto-preset function 43 F 5 Auto-shift setting 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off setting 55 F80 Power saving mode 56 F81 Security code 57 F90 Setting of all

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

Fieldbus system EtherNet/IP compatible SI Unit

outputs) 0 2 Digital output unit EX600-DY#F (16 outputs) 0 2 EX600-DM#E (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DM#F (8 inputs/8 outputs) 1 1 -80No.EX-OMZ0024 Allocated bytes (continued) Allocated bytes Unit Unit part number Input Output EX600-AXA 4 (2 bytes per channel) 0 (2 channels) Analogue input Unit EX600-AXB 8 (2 bytes per channel) 0 (4 channels) (2 channels) 0 4 Analogue

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

upon receipt of order. 8-9-8 8 Air Slide Table Long Stroke Type Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F MX MTS L L L MY L dimension mm L dimension

A_HEC-OM-K001

Indicated contents F i n e C o n t r o l o f Sets the fine adjusting value to calibrate the internal temp. sensor.

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

energy saving effect

G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

Valve Single Unit

stations 12 NPTF 00T Note) For SS5X3: 4 to 12 stations.

Sensor Monitor

0 Units selection function 27 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F80 Power saving mode 46 F81 Security code 47 F82 Input of line name 49 F90 Setting of all functions 50 F98 Output check 52 F99 Reset to default settings 54

CQS

L F G D Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm In the case of long strokes, use either ends tapped mounting or bracket mounting. Mounting brackets are shipped together, (but not assembled).

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.