Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1.5, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 2, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 2.5, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 3, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 4, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1.5, Connector size: R1/4

Types: Nozzle, Nozzle Shape: Standard, Features: Standard, Nozzle Connection Port Type: Male Thread, Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 2, Connector size: R1/4

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

Air Cylinder

12 10 (12) M5 x 0.8 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 4 38 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 8 52 4 41 54 90.5 21 80 14 24 22 100.5 16 40

VZ100/300/500

0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6 Body ported For external pilot 1 8 VZ32R VV3Z3-21R-1 M5 x 0.8 0.47 0.43 0.13 0.74 0.32 0.19 1 8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22

Refrigerated Air Dryer

IDF-BP303 IDF-BP311 IDF4E IDF4E 531 560 595 110 2.3 595 110 2.4 175 175 1/2 1/2 I D F I D F IDF6E IDF6E 555 587 617 617 IDF-BP304 IDF-BP312 IDF8E IDF8E 129 3.3 129 3.4 187 182 3/4 3/4 627 659 647 647 31 31 IDF11E IDF11E IDU-BP305 IDU-BP306 IDU-BP307 IDU-BP313 IDU-BP314 IDU-BP315 506 530 572 572 100 1.6 100 1.7 202 192 IDU3E IDU3E 3/8 3/8 I D U I D U 603 632 625 625 110 2.3 110 2.4 175 175

Aluminum High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

Electric Actuator Triple Axis P&P Unit

For detailed information about each part, please refer to information provided by P/A. 2 ) 3 ) 4 ) 5 ) 6 ) 7 ) 8 ) 9 ) 8 Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+240(Table movement range) 40 30 4-M8 x 1.25 thread depth 16 40 Polyurethane stopper 30 110 2-8H7depth10 Home position gauge 200 180 (Refer to 4) (Refer to 4) 110 (Refer to 4) (Refer to 4)

Air Cylinder Series MB

136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9

0.4

L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

Table of Contents

stations) VV5Q04-08FU2-D 1 set (F kit 8 station manifold base no.)