44

(Except swivel elbow) Weight Weight 24 g 38 g Fluid temperature Sleeveless sealing structure makes replacement parts for maintenance unnecessary.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

HEC-OM-S008

0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11

CM2

A E1 L R1 NZ NX MM +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 36 Y-020B Y-032B Y-040B 9 46 16 20 25 5 14 18 M8 X 1.25 CDP-1 20 9 C9 type for pivot 38 9 48 18 20 25 5 14 18 M10 X 1.25 CDP-1 25,32 9 C9 type for pivot 55 12 68 22 24 49.7 13 25 38 M14 X 1.5 3 X 18l CDP-3 40 16 Clevis pins and snap rings (cotter pins for bore size 40) are attached.

High Purity Fluoropolymer

21 45 22 11 20 24.5 1/2" 39 LQ1B4D-M LQ1B5D-M LQ1B5C-M LQ1B5B-M LQ1B5A-M 1/2" 30.5 38 7 39 26 54 28 14 29 39 30 3/4" LQ1B6A-M LQ1B6B-M LQ1B6C-M LQ1B6D-M 3/4" 36 8 45 36 69.5 36 18 39.5 49 1" 35 11 High Purity Fluoropolymer Fittings Series LQ1 Female Branch Tee: LQ1B-F Metric sizes M Connection threads Rc/NPT Model Applicable tubing O.D.

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36 38 45 56 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38

REA/REB

A mounting surface with a high degree of flatness is desirable, but in cases where this is not possible, adjust with shims, etc. 10-2-38 38 Series REAL Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) WA: Allowable load weight based on these operating conditions (kg) Wv: Allowable load weight for vertical operation (kg) : Stroke coefficient

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Basic Type/Direct Mount Type

D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14

ISO Standard Hydraulic Cylinder

31 13 1/2 69 50 18 74 115 153 80 25 to 800 10.5 M33 x 2 57 32 15 223.5 M10 x 1.25 45 96 41 75 45 74 13 41 35 42 17 1/2 77 60 17 80 133 168 100 25 to 1000 14.5 M42 x 2 58 42 15 257.5 M14 x 1.5 56 115 52 90 56 86 16 50 41 38 19 3/4 79 72 22 97 146 187 Transaxial foot: CHSDLA PJ + Stroke Y J MM S + Stroke H B 2 x RcP GB GA Air release LY D E V V LH LT X1 X2 K F Y1 Cushion valve G C M Y2 MA

7

38 L Hole: 12 +0.027 H8 0 30 30 17 17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

18 A1 L1 U1 Y-10D 100 37 21 40 83 83 M26 x 1.5 20 30+0.3 +0.1 61 21 38 4 x 30l Polished round 20 RR1 * A knuckle pin, split pins and flat washers are included.

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

15

27 27 10.5 22.5 14 8.6 25 5.5 74 28 51 2 10 104 76 95 9 12 Bumper bolt Adjustment bolt P Shock absorber T PB S Z PA PW Q QW R R1 UU W Y1 Model Nil TN TF NN adjustable range adjustable range (Both sides: R1 x 2) (Both sides: Y1 x 2) CY1S6-Z M6 x 0.75 RJ0604N M4 x 0.7 M30.5 25 25 49 52 7.5 15 42 10 46 11.5 23 62 16 1 CY1S10-Z M8 x 1 RJ0806HN M4 x 0.7 M50.8 25 38 61 60 5.5 11 47 12.5 58

Compact Cylinder

55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw

Table of Contents

27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l

MGQ

38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

D 11.4 11.4 13.4 d 6 6 8 WX 38 48 54 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 Bore size (mm) 25 32 40 8-12-19 20 Series MY1W Dimensions: 50, 63 4-MM depth M (LL) L 4-B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB PG Q+ Stroke Rc 3/8 (Hexagon socket head taper plug) This port is not available for use.