VQ5000

Note2) For thread standard, refer to page 2-6-39.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D

New

Lower tightening torque will lead into fluid leakage. 25 or more 39 or more 57 or more 52 or more 69 or more 88 or more 29 or more 39 or more 56 or more 58 or more 70 or more 82 or more 16 or more 30 or more 32 or more 40 or more 50 or more 60 or more Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Tightening Torque for Piping Proper tightening torque Nm 3 to 5 8 to 12 15 to 20 20 to

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 2) Refer to page 2-5-39 for external pilot specification. Combination of external pilot and perfect interface is not possible.

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

High performance type Step Motor Controller (Servo/24 VDC)

A Communication error occurred (01-150) RESET Communi D SVON cation Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upper-level devices.

CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

VZ100/300/500

14 254 245 13 238 229 12 222 213 11 206 197 10 190 181 9 174 165 8 158 149 7 142 133 6 126 117 5 110 101 4 94 85 3 78 69 2 62 53 M5 L3 47 63 79 95 111 127 143 159 175 191 207 223 239 255 271 287 303 319 335 L1 L2 Rc 1/8 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 L3 48 65 82 99 116 133 150

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

Clean Room Rodless Cylinder Series CYP ø15, ø32

HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6

Step Motor Controller (Servo / 24 VDC)

RESET Ctrl Comm ALM (1-150) D SVON Do not remove the cable during operation by the controller setting kit or teaching box. Input *1) Abnormality in communication with the encoder. Encoder ALM (1-192) E Power off Check the connection of the actuator cable. Unable to find the motor phase within the set time.

Cylinder with Lock Series CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

Information

LE-CSNS: 10120-3000PE (connector)/10320-52F0-008 (shell kit) manufactured by 3M or equivalent item. 39 39 39 Regeneration option (LECSm common) 6 Mounting hole LA LEC MR RB (12) 144 12 (6) 15 Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm regeneration option to be used in Model Selection. 5 156 168 Dimensions [mm] LB 119 169 LC

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 Series IF3 Flow Rate vs.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

0.8 (Finger opening port) Auto switch mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39

New

Unit: mm Mounting pitch A Straight Tube portion length size Nylon tube Soft nylon tube Polyurethane tube 1/8" 44 or more 84 or more 89 or more 29 or more 39 or more 56 or more 58 or more 70 or more 82 or more 25 or more 39 or more 57 or more 52 or more 69 or more 88 or more 16 or more 30 or more 32 or more 40 or more 50 or more 60 or more 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

180° Angular Style Air Gripper Series MHY2/MHW2

Refer to front matters 38 and 39 for Safety Instructions and pages 358 to 365 for Air Gripper and Auto Switch Precautions. Mounting MHW Tighten the bolt from this side Warning Finger When using right angle finger tap mounting type, monitor the interference of the bolt with the speed controller.

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.