REC

Up to 700 45 25 150 Up to 700 25 45 MK(2) 1500 32 150 Up to 1000 32 50 RS Q G 40 200 Up to 1000 40 60 Note 1) The cylinder performance may not as expected when stroke is shorter than recommended stroke even they are available.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 1000 for LEFS25 H Lead 14 - LECSB-T LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Series Lead symbol S Lead 54 Initial Parameter *1,*2 Para value Recommended value No Number of command input pulses per revolution *3. PA05 10 10 Electronic gear numerator *3.

Aluminum High Vacuum Angle Valve

Specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Valve type Inert gas under vacuum Fluid (C) 5 to 150 Operating pressure (Pa) (abs) 10-6 to atmospheric pressure Conductance (L/s) Note 1) 80 45 14 5 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature, excluding

2/3 Port Valve

12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

VS7-6

VS7-8-FG-S AXT510-12 AXT510-21 AXT510-13 AXT510-13 AXT510-13 AXT510-14-2 AXT510-14-2 AXT510-14-2 AXT510-14-1 AXT510-14-1 AXT510-14-1 MY-16N MY-16N MY-14N Description No.

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

LEC-OM071xx

If 8 or a higher COMM_ALM has occurred, the system shifts 14 to communication phase 2.

PF2A/PF2W

Port size Applicable model Flow rate (l/min) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Specifications PF2A703H PF2A706H Dry air Heater type 300 to 6000 l/min PF2A712H Model Measured fluid Detection type Flow rate measuring range Note 1) 600 to 12000 l/min 10 l/min 150 to 3000 l/min 5 l/min Minimum setting unit Note 1) l/min, CFM l, m3, m3 x 103, ft3, ft3 x 103

LG1H

It will cause failure of the driver or its peripheral devices. 14. Do not use the product in an environment subject to a 5. If a danger against the personnel is expected due to an temperature cycle.

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

PFxx-OMA1007

For all unused M12 connectors. 14 Seal cap (1 pc.)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25

CG5-S

41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x 1.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

ZP

Q ZP T 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 40 50 A14 06 19.9 12 6 3 08 24.9 14 8 Width across flats P N N Dimensions Per Vacuum Inlet: Barb Fitting Model N P Fitting part min. hole size Vacuum inlet direction q Pad dia.

HRX-OM-X084

State (7): AL.14 report since 45 sec has elapsed since the circulating fluid temperature deviated, because it is outside the upper temperature monitoring range. TEMP OUT output ON. State (8): The alarm is reset manually, the temperature monitoring upper and lower limit range is out, so "AL.14", "AL.15" warning continue.

VDW

Valve Leakage Fluid and Ambient Temperature Internal Leakage Ambient temperature F (C) Fluid temperature F (C) Seal material Leakage rate (Air) Note) 14 to 122 (10 Note) to 50) 1 cm3/min or less (AIuminum body type) 14 to 122 (10 to 50) NBR 15 cm3/min or less (Resin body type) Note) Dew point temperature: 14F (10C) or less External Leakage Seal material Leakage rate (Air) Note) 1 cm3/min

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.