AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Vacuum Pad: Ball Joint Type

-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F 10-0-A10 (With buffer/One-touch fitting) ZPT F 10-01-A14 (With buffer/Female thread) Applicable tubing O.D.

MHZ2/MHZJ2

MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45 25 MHZ2-25S (N) 12 4 55 10 MHZ2-10C (N) 31 Single acting type, normally closed 6 115 16 MHZ2-16C (N) 56 10 240 20 MHZ2-20C (N) 83 14 430 25 MHZ2-25C (N) Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5

Parallel Style Air Gripper Series MHZ

115 235 430 715 1275 27 55 115 240 435 760 1370 27 55 115 240 430 760 1370 4 4 6 10 14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 JIS Symbol Double acting Double acting Single acting type, Normally open Single acting type, Normally closed Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 Refer to pages 436 to 440

VXR21/22/23

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

VQ7-6/7-8

In cases where back pressure effects actuator operation due to simultaneous operation of manifold valves, etc., this effect can be eliminated by installing a plate between the manifold block and the valve from which back pressure is to be prevented. 1 1 2 4 5 3 5 3 10 Series VQ7-6 Optional Manifold Parts Silencer box Pilot EXH silencer VV71---SB AN110-01 This can be provided as a unit on

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

VQ7-6/7-8

In cases where back pressure effects actuator operation due to simultaneous operation of manifold valves, etc., this effect can be eliminated by installing a plate between the manifold block and the valve from which back pressure is to be prevented. 1 1 2 4 5 3 5 3 3-10-15 Series VQ7-6 Manifold Option Parts Silencer box VV71---SB Pilot EXH silencer AN110-01 This can be provided as a unit

Water-cooledThermo-chiller

Stop Water Leak Detect FLT 01 The power supply to this unit is incorrect. Stop Incorrect Phase Error FLT 02 The amount of circulating fluid tank is running low. Stop Reservoir Low Level FLT 05 The amount of circulating fluid tank is running low. Continue Reservoir Low Level WRN 06 The amount of circulating fluid in the tank has increased.

Electromagnetic Digital Flow Switch

Note Panel mount adapter ZS-26-B With waterproof seal, mounting screw Front protective cover + Panel mount adapter ZS-26-C With waterproof seal, mounting screw Front protective cover only ZS-26-01 Separately order panel mount adapter, etc. Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc.

S Couplers

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

Table of Contents

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0

VFM300

Roller Lever/VFM250-02-01, VFM250-02-01S JIS Symbol 8N F.O.F. 0.5MPa supply 2.2mm P.T. 4mm O.T. 6.2mm T.T. One Way Roller Lever/VFM250-02-02, VFM250-02-02S JIS Symbol 7N F.O.F. 0.5MPa supply 2.4mm P.T. 4.6mm O.T. 7mm T.T. 3.5-55 VFM200 Series VFM200 Straight Plunger/VFM250-02-05 Panel mounted hole SA JIS Symbol VA SA VA 20N F.O.F. 0.5MPa supply 1.5mm P.T. 2mm O.T. VM/VR 3.5mm T.T.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

30

(mm) H (Width across flat) 12 12 17 12 17 19 14 17 19 17 19 Connection thread Rc Note 1) D M Weight (g) L1 L2 Model KQB2F23-01 KQB2F04-01 KQB2F04-02 KQB2F06-01 KQB2F06-02 KQB2F06-03 KQB2F08-01 KQB2F08-02 KQB2F08-03 KQB2F10-02 KQB2F10-03 KQB2F12-02 KQB2F12-03 KQB2F12-04 KQB2F16-03 KQB2F16-04 3.2 8 23.3 23.7 28.7 24.2 29.2 30.6 26.3 31.3 32.7 31.6 33 32.6 34 39.3 35.3 40.6 3.4 5.6 1/8 1/8 1