Plug-in/Plug Lead: Single Unit

Flow rate (l/min (ANR)) 5 to 60C (No freezing) Port size for connection of pressure gauge M5 x 0.8 ARBQ5000-00-B (P B) 0.7 Weight (kg) 0.79 0.74 0.78 0.73 0.79 0.74 0.6 Outlet pressure (MPa) P A 33 75 29 Effective area at supply side (mm2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 0.5 P B 64 33 28 0.4 A EA 36 75 78 Effective area at exhaust side (mm2) S at P2 = 0.5 MPa 0.3 B EB 68 38 69 0.2 Note

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.

MNB

5 4 3 5 4 3 MNB 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40

MNB

500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100

13

Calculation Pad W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting W = P x S x 0.1 x 1 t This type of application should basically be avoided.

air-filter-e

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Air Preparation Equipment

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

F

E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Nil Rc TN NPT Lock operation Number of auto switches Tube material E Spring locking (Exhaust locking) P Pneumatic locking (Pressure locking) D Spring and pneumatic locking Nil Aluminum tube F* Steel tube H Air-hydro type Bore size Nil 2 pcs. S 1 pc. n n pcs. 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Not available with auto switch.

Compact Manifold Regulator

P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L1 + (3 x P) (mm) (mm) Q1 Q2 Q1 = M L1 = Shaft type Shaft type S Y S Y Size Size 10 10 Not available Not available L2 + (3 x P) 15 15 M3 M3 20 20 M3, M4 M3, M4 L2 = Q2 = M 30 30 M3, M4, M5 M3, M4, M5 Symbol: A33 Machine female threads into the long shaft. Symbol: A34 Machine female threads into the short shaft.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MG

(Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K PA + Stroke GB Q (Plug) FA FB C + Stroke G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.

5 Port Solenoid Valve Series VQZ1000/2000/3000

block (Separated) for VQZ1000 VQ1000-FPG-Perfect block (Separated) for VQZ2000/3000 VQ2000-FPG-Connector assembly for single solenoid SY3000-37-81A--N for double solenoid SY3000-37-81A--+ -+ -+ + + + M S C M S C C S M C S M NI NI IN IN OUT OUT B B 2 To CYL port To CYL port 4 P.960 P.961 P.962 P.974 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

Refrigerated Thermo-chiller

P. 192 Refrigerator P. 192 Relay P. 198 Relief valve P. 195 RS232C P. 198 RS485 P. 198 RTD (Resistance Temperature Detector) P. 196 S Sealing mechanism P. 194 SEMI F47 P. 199 SEMI S2 P. 199 SEMI S8 P. 199 Signal input/output, I/O P. 199 Solenoid valve P. 195 Solid state relay (SSR) P. 198 Specific heat/Specific heat capacity P. 195 Specific resistance P. 195 Specified CFC P. 192 SV P. 196

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(Rc, NPT, M thread) X E Stroke F Q S 2 x N through 4 x depth of counterbore Y 0 0.1 D G E T M L V B + Stroke H + Stroke A + 2 stroke 32 40 50 RSQB R Bore size: 32, 40, 50 2 x P (Rc, NPT, G) Z Q S F Stroke X J I 0 0.1 D G M E T V 4 x N through B + Stroke H + Stroke M 8 x O depth of counterbore A + 2 stroke E Built-in One-touch fittings (20 to 50) Tubing O.D.