ZP

P Applicable tubing O.D.

HRX-OM-W002

9.6 Pump capacity 9-15 HRX-OM-W002 Chapter 9 Documents 9.6.5 HRR012/018/024/030-A/W-20-T1 Fig 9-18 Pump capacity(HRR012/018/024/030-A/W-20-T1) 9.6 Pump capacity HRR Series 9-16 HRX-OM-W002 Chapter 9 Documents 9.7 Required facility water flow (for water-cooled type) 30 HRR030-W-20 HRR024-W-20 Facility water flow rate [L/min] 25 HRR018-W-10/20 20 HRR012-W-10/20 15 10 5 0 0 10 20 30 40 50 Facility

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

P R B B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 85.4 77.9 52.6 [59.6] 66.6 M8

MXS

Vibrations on guide and moving part resistance will result when power over the allowable moment is applied. rFlatness of mounting surface should be less than 0.02mm. l l l allowable load and allowable moment. Refer to p.3.11-10 and 3.11-11 for the details.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Cylinder with Lock

344 26 8 Series CNA2 Dimensions Axial foot (L): CNA2L BP (Rc, NPT, G) unlocking port Unlocked when pressurized Rc BQ Plug with breathing hole P (Rc, NPT, G) Rod end cylinder port GA GD GC GR GL GL1 T Width across H P (Rc, NPT, G) Head end cylinder port flats KA With bellows K A AL Width across 4 x J 2 x Cushion valve 10.2 f l GB F flats B1 MM 4 x LD e E D C B LY LH V H1 LT N BN LX h + l X

CC-Link-E

t y w i t h l ow ri ppl e.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

base weight W (g) n: Station W = 36n + 6 W = 43n + 64 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both side.

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

39

M N O P Q J K L M N O P Q Part no.

Electric Slide Tables

LES8R/L LESH8R/L LES8D LES16R/L LES16D LESH16R/L LESH16D LES25R/L LES25D LESH25R/L LESH25D M3 x 0.5 0.63 M4 x 0.7 1.5 When a cable duct or flexible moving tube is attached to the actuator, the sliding resistance of the table increases and may lead to operational failure of the product. L M5 x 0.8 3 16.

Direct Solenoid

p, (1) ru&or @$prugd.Err 13,11) hdE bi|Eme$nbr! d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

CG5-S

Flat type/CJ-CF MM Double clevis type cylinder A 7 TH 4-TC C0.5 +0.2 0 TU D D 0.1 0.3 TN C0.5 12 N W L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.

JXCx-OMY0008

If W-AREA1 >W-AREA2, the "Parameter ALM" alarm will be Basic parameter "Stroke (-)" W-AREA1 W-AREA1 "Stroke (+)" Basic parameter "Stroke (-)" W-AREA2 W-AREA2 activated. However if W-AREA1= W-AREA2 = 0, WAREA will be OFF and no alarm will be generated.

Digital Pressure Switch ( compatible)

-M): 0 ISE20B-L-P: 4 ZSE20B-L(-M): 1 ZSE20B-L-P: 4 ZSE20BF-L(-M): 1 Unit (Selection of display unit) 0x03E8 (1000) 0 R/W Y U8 ZSE20BF-L-P: 4 NorP (Selection of PNP/NPN) Setting of switch output specification 0: NPN 1: PNP 0x03E9 (1001) 0 R/W Y U8 0x01 (1) Setting of display color 0: red (Constantly red) 1: Grn (Constantly green) 2: 1SoG CoL (Selection of display color) (OUT1 turns green at

45

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.