ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

x 0.8 x 16 L Auto switch Hexagon socket head set screw M4 r Hook Put the auto switch on the surface of the cylinder tube. e w Auto switch mounting band Auto switch Auto switch mounting bracket q D-A44 type Tie-rod Auto switch mounting screw M5 x 0.8 x 16 L Auto switch Cylinder tube Hook 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

R.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

R.

rep-modular-e

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch

Serial Transmission System Series EX250 Series EX500

External pilot Low wattage type (0.5 W) Nil R Y 3 position exhaust center A B Note 2) 4 Note 1) When specifying more than one option, enter symbols in alphabetical order.

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

q r u #0 MX MTS !

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014