Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

CA2

C95 Center Trunnion Style: CA2T CP95 With rod boot NCM Z + l + 1/2 Stroke Z + 1/2 Stroke G G 2-P (Rc, NPT, G) Width across flats KA 4-J 2-cushion valve MM NCA TDe8 DD E e TY -X B1 20H1 B C AL l 9 f K A N F TT N h + l Data TX TZ S + Stroke H ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B1 C AL D E F G H1 J K KA MM N P Without rod boot With rod boot 40 up to 500 20 to 500

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

SV

L3 L4 1-2-79 Dimensions: Series SV2000 for Flat Ribbon Cable P PG PH U D B C4, N3 C6, N7 C8, N9 1 2 Cassette base manifold: SS5V2-16 D Stations (S, R, RS) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Electric Actuator/Slider Type

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Air Cylinder

+ l + Stroke h + l 8 8 8 8 IJ e JH f f JW l ZZ + 2 ( l + Stroke) S + Stroke h + l l + Stroke h + l + Stroke (mm) Bore size Stroke range A AL B1 C D E F GA H1 I J K KA MM NA P S Standard Long stroke 20 Up to 200 201 to 1500 18 15.5 13 14 8 12 2 12 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 77 25 Up to 300 301 to 1500 22 19.5 17 16.5 10 14 2 12 6 31 M5 x 0.8 depth

Table of Contents

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7 1 Please refer to pages 14-20-62 to 64 for specific product precautions.

CRB2/CRBU2/CRB1

E (g6) F (h9) M L K D G C B Model A CDRB2BWU10-S 4 9 10 0.5 9 14 3 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 18 4 47 20 34 CDRB2BWU15-D CDRB2BWU20-S 6 14 20 0.5 10 20 4.5 51 29 42 CDRB2BWU20-D CDRB2BWU30-S 8 16 30 1 12 22 5 55.5 40 50 CDRB2BWU30-D R Q Y P N Model 90 100 180 270 CDRB2BWU10-S M5 x 0.8 M5 x 0.8 M3 x 0.5 18.5 24 25 M3 x 0.5 with depth 5 CDRB2BWU10-D M3 x 0.5 CDRB2BWU15-S M5 x

REA/REB

B 4-Counter bore depth C MM thread depth M Hollow shaft for piping FA FB EB H S + Stroke HO TT T HP 4-J depth JK HI HG PA Slider Type/Slide Bearing REAS H 2-P HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT Slider Type/Ball Bushing REAL (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A High Precision Guide Type REAH N N Max.

SYJ3000/5000/7000

R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 4) Interface regulator is only capable of regulating the P port pressure. 0.06 1.9 2.1 4.5 4.5 P A P B A EA B EB Effective area at supply side (mm2) (3) S at P1 = 0.7 MPa, P2 = 0.5 MPa Effective area at exhaust side (mm2) (3) S at P2 = 0.5 MPa How to Order Solenoid Assembly Non plug-in type C DXT170 5 L Flow Characteristics {1(P) 4(A)} Conditions: Inlet pressure setting 0.7 MPa

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 M8 x 1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6 [103] R1 P R2 R1 P R2 R1 P R2 79 [83.4] 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to page 375 for dimensions with connector

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

CM2

Area: (800) 258-9200-www.stevenengineering.com ZZ + 2 x Stroke LZ + 2 x Stroke Z + 2 x Stroke H + Stroke S + Stroke Plug with fixed orifice Rc P Width across flats B1 Built-in One-touch fittings One-touch fitting port size P Spring extend One-touch fitting port size P Spring return H1 H G F D N CX MM AL CI L P U A CD I B1 E K NA NN RR Bore size (mm) 0 0.033 20 41 8 13 8 12 M8 x 1.25 20 12

Table of Contents

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

P When mounted on the manifold, the common exhaust discharges the pilot and main valve exhaust through a common exhaust port to enable simple exhausting. 700 B 600 Max.operating speed (mm/s) Piping length1m JIS Symbol B A 500 Piping length5m A D SY (Single) 400 R P SYJ C 300 SX How to order valve with built-in speed controller SYJ5l 5l--lll l--l 200 VK Port size VZ 100 Config.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

CJ2

6) B L F D Action S T Single acting/Spring return Single acting/Spring extend Standard CJ2 L S 16 45 R CDJ2 L S 16 45 C73 With auto switch R Number of switches With auto switch 2 1 n S n Built-in magnet Auto switch Port location on head cover Refer to the table below for selecting applicable auto switches.

CY1

No Determination of load's kinetic energy (E) E>Es EEs Bore size determination Tentative determination of L type Note 2) E>Es Determination of pressure (P) when making intermediate stop P>Ps Review of order made products based on operating conditions PPs Tentative determination of L type (Refer to p. 64 to 71.) (Refer to p. 27 for intermediate stops.)