Digital Flow Switch

Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Low Profile Guide Type

A1 (mm) Note 2) Operating range Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 Mounting pattern w B2 A2 5 40.5 99.5 28.5 111.5 40.5 111.5 Note 1) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

MRQ

F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not

Vacuum Unit Ejector / Vacuum Pump System

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

VM

POM ADC Material Note r Description Material q Description Retainer Over travel spring Plunger Body Metallic plated t y w e Spring Spool valve Steel Zinc chromated Rubber lined Aluminum alloy, NBR Series VM800 Basic VM830-01-00 JIS Symbol Actuator mounting hole P .T. (Pre-Travel) 1 O.T. (Over Travel) 2 T.T.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

MXY6 MXY8 MXY12 Model Allowable static load Table (4) Allowable Static Load: F (N) Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.

CL

NDH10 MM MM L L RR1 E1 E1 A1 U1 NX NZ NX L1 NZ A Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable bore size (mm) Applicable pin part no. Part no. NDH10 Part no.

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

LG1H

3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

VR4151/4152

N.C. common type (With VM430) X102 01 Port size Rc 1 8 NPT N01 1 8 G F01 1 8 Dimensions Bracket mounted Panel mounted 2-6.5 hole Mounting screw M6 x 1 x 12 Rc 1/4 Spare tank connecting port processing possible 4-M6 thread Bottom of bracket Bracket side 4-7 hole Knob side Bracket plate t = 2 Panel thickness t = 3 or less Rc 1/8 signal pressure port 2-M6 x 1.0 thread depth 8 Panel mounting

9.8

Note 3) Not available for piping specifications of 01 and N01.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M18 x 1.5 M22 x 1.5 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 Torque Related 63 63 Equipment Vacuum entry 80 80 100 100 B01 N01 T01 1 8 NPT 1 8 NPTF 1 8 Rc 125 125 Pad type H Heavy duty Buffer stroke (Rotating) Stroke 40 50 63 80 100 125 50 25 Material N S NBR 75 Silicon rubber Urethane rubber Fluororubber 100 U F E EPR 1193 Series ZPT ZPT HJ-01-A18 (With buffer) 40 50

Servo Motor Controller (24 VDC)

CN2 and CN3 connectors Single wires Cable tie A1 Actuator cable A1 B1 Actuator B1 Controller Shrink sleeve Noise filter Cable tie Motor cable (Actuator with lock) Caution 1) The assembly method is different for actuators with lock or without lock. 2) When mounting a noise filter on the actuator cable, fit all of the single wires into the noise filter.

Rotary Actuator

Applicable shaft types: J, K, T Applicable shaft types: K, T Equal dimensions are indicated by the same marker.

Air Pilot Operated Series NVSA

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Air Pilot Operated

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.